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Keita Sugiura
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Laser gauge interferometer
Patent number
8,456,642
Issue date
Jun 4, 2013
Canon Kabushiki Kaisha
Keita Sugiura
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
LASER GAUGE INTERFEROMETER
Publication number
20110043819
Publication date
Feb 24, 2011
Canon Kabushiki Kaisha
Keita Sugiura
G01 - MEASURING TESTING