Keith A. Edwards

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for detecting a process endpoint
- Patent number 6,572,443
- Issue date Jun 3, 2003
- Advanced Micro Devices Inc.
- Peter J. Beckage
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for detecting the endpoint of a chemical-mecha...
- Patent number 6,179,688
- Issue date Jan 30, 2001
- Advanced Micro Devices, Inc.
- Peter J. Beckage
- B24 - GRINDING POLISHING