Keith A. Edwards

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Austin, TX, US

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor run-to-run control system with state and model parame...
- Patent number 6,748,280
- Issue date Jun 8, 2004
- Brooks Automation, Inc.
- Jianping Zou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor run-to-run control system with missing and out-of-ord...
- Patent number 6,725,098
- Issue date Apr 20, 2004
- Brooks Automation, Inc.
- Keith A. Edwards
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor run-to-run control system with missing and out-of-ord...
- Publication number 20030078680
- Publication date Apr 24, 2003
- PRI AUTOMATION, INC.
- Keith A. Edwards
- G05 - CONTROLLING REGULATING