Keith E. Dawson

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Tactile wafer lifter and methods for operating the same
- Patent number 8,657,556
- Issue date Feb 25, 2014
- Lam Research Corporation
- Keith E. Dawson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Tactile wafer lifter and methods for operating the same
- Patent number 8,317,450
- Issue date Nov 27, 2012
- Lam Research Corporation
- Keith E. Dawson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Linear drive system for use in a plasma processing system
- Patent number 6,863,784
- Issue date Mar 8, 2005
- Lam Research Corporation
- Fangli Hao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear drive system for use in a plasma processing system
- Patent number 6,669,811
- Issue date Dec 30, 2003
- Lam Research Corporation
- Fangli Hao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealing techniques suitable for different geometries and constraine...
- Patent number 6,536,777
- Issue date Mar 25, 2003
- Lam Research Corporation
- Fangli J. Hao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Linear drive system for use in a plasma processing system
- Patent number 6,350,317
- Issue date Feb 26, 2002
- Lam Research Corporation
- Fangli Hao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single-piece gas director for plasma reactors
- Patent number 5,942,074
- Issue date Aug 24, 1999
- Lam Research Corporation
- Eric Howard Lenz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal control of semiconductor wafer during reactive ion etching
- Patent number 5,609,720
- Issue date Mar 11, 1997
- Lam Research Corporation
- Eric H. Lenz
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TACTILE WAFER LIFTER AND METHODS FOR OPERATING THE SAME
- Publication number 20130066459
- Publication date Mar 14, 2013
- Keith E. Dawson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Tactile Wafer Lifter and Methods for Operating the Same
- Publication number 20100111651
- Publication date May 6, 2010
- LAM RESEARCH CORPORATION
- Keith E. Dawson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate support having temperature controlled substrate support s...
- Publication number 20040187787
- Publication date Sep 30, 2004
- Keith E. Dawson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Linear drive system for use in a plasma processing system
- Publication number 20040108301
- Publication date Jun 10, 2004
- Fangli Hao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Linear drive system for use in a plasma processing system
- Publication number 20020100555
- Publication date Aug 1, 2002
- LAM RESEARCH
- Fangli Hao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALING TECHNIQUES SUITABLE FOR DIFFERENT GEOMETRIES AND CONTRAINED...
- Publication number 20010045706
- Publication date Nov 29, 2001
- FANGLI J. HAO
- H01 - BASIC ELECTRIC ELEMENTS

Keith E. Dawson

Person

Patents Grantslast 30 patents

Tactile wafer lifter and methods for operating the same

Tactile wafer lifter and methods for operating the same

Linear drive system for use in a plasma processing system

Linear drive system for use in a plasma processing system

Sealing techniques suitable for different geometries and constraine...

Linear drive system for use in a plasma processing system

Single-piece gas director for plasma reactors

Thermal control of semiconductor wafer during reactive ion etching

Patents Applicationslast 30 patents

TACTILE WAFER LIFTER AND METHODS FOR OPERATING THE SAME

Tactile Wafer Lifter and Methods for Operating the Same

Substrate support having temperature controlled substrate support s...

Linear drive system for use in a plasma processing system

Linear drive system for use in a plasma processing system

SEALING TECHNIQUES SUITABLE FOR DIFFERENT GEOMETRIES AND CONTRAINED...