Keith Hansen

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Defect classification and source analysis for semiconductor equipment
- Patent number 11,263,737
- Issue date Mar 1, 2022
- Lam Research Corporation
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Fault detection apparatuses and methods for fault detection of semi...
- Patent number 8,791,714
- Issue date Jul 29, 2014
- Novellus Systems, Inc.
- Keith John Hansen
- G01 - MEASURING TESTING
Information Patent Grant
Fault detection apparatuses and methods for fault detection of semi...
- Patent number 8,120,376
- Issue date Feb 21, 2012
- Novellus Systems, Inc.
- Keith John Hansen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method for manufacturing metal sputtering target for use in DC magn...
- Patent number 6,228,186
- Issue date May 8, 2001
- Applied Materials, Inc.
- Vikram Pavate
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target for use in magnetron sputtering of aluminum for forming meta...
- Patent number 6,171,455
- Issue date Jan 9, 2001
- Applied Materials Inc.
- Vikram Pavate
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target for use in magnetron sputtering of aluminum for forming meta...
- Patent number 6,126,791
- Issue date Oct 3, 2000
- Applied Materials, Inc.
- Vikram Pavate
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purging gas control structure for CVD chamber
- Patent number 6,113,699
- Issue date Sep 5, 2000
- LSI Logic Corporation
- Keith J. Hansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target for use in magnetron sputtering of aluminum for forming meta...
- Patent number 6,001,227
- Issue date Dec 14, 1999
- Applied Materials, Inc.
- Vikram Pavate
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-situ etch of CVD chamber
- Patent number 5,914,001
- Issue date Jun 22, 1999
- LSI Logic Corporation
- Keith J. Hansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas control technique for limiting surging of gas into a CVD chamber
- Patent number 5,853,804
- Issue date Dec 29, 1998
- LSI Logic Corporation
- Keith J. Hansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filtering technique for CVD chamber process gases
- Patent number 5,681,613
- Issue date Oct 28, 1997
- LSI Logic Corporation
- Keith J. Hansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tungsten deposition process for low contact resistivity to silicon
- Patent number 5,391,394
- Issue date Feb 21, 1995
- LSI Logic Corporation
- Keith J. Hansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for performing in-situ etch of CVD chamber
- Patent number 5,211,796
- Issue date May 18, 1993
- LST Logic Corporation
- Keith J. Hansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for performing in-situ etch of a CVD chamber
- Patent number 5,203,956
- Issue date Apr 20, 1993
- LSI Logic Corporation
- Keith J. Hansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for conducting a refractory metal deposition process
- Patent number 5,180,432
- Issue date Jan 19, 1993
- LSI Logic Corporation
- Keith J. Hansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure for filtering CVD chamber process gases
- Patent number 5,123,375
- Issue date Jun 23, 1992
- LSI Logic Corporation
- Keith J. Hansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote measurement of temperature
- Patent number 5,021,980
- Issue date Jun 4, 1991
- LSI Logic Corporation
- Paul Poenisch
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20220270237
- Publication date Aug 25, 2022
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20200226742
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FAULT DETECTION APPARATUSES AND METHODS FOR FAULT DETECTION OF SEMI...
- Publication number 20120123737
- Publication date May 17, 2012
- Novellus Systems, Inc.
- Keith John HANSEN
- G05 - CONTROLLING REGULATING
Information Patent Application
FAULT DETECTION APPARATUSES AND METHODS FOR FAULT DETECTION OF SEMI...
- Publication number 20090153144
- Publication date Jun 18, 2009
- Novellus Systems, Inc.
- Keith John HANSEN
- G05 - CONTROLLING REGULATING

Keith Hansen

Person

Patents Grantslast 30 patents

Defect classification and source analysis for semiconductor equipment

Fault detection apparatuses and methods for fault detection of semi...

Fault detection apparatuses and methods for fault detection of semi...

Method for manufacturing metal sputtering target for use in DC magn...

Target for use in magnetron sputtering of aluminum for forming meta...

Target for use in magnetron sputtering of aluminum for forming meta...

Purging gas control structure for CVD chamber

Target for use in magnetron sputtering of aluminum for forming meta...

In-situ etch of CVD chamber

Gas control technique for limiting surging of gas into a CVD chamber

Filtering technique for CVD chamber process gases

Tungsten deposition process for low contact resistivity to silicon

Apparatus for performing in-situ etch of CVD chamber

Method for performing in-situ etch of a CVD chamber

Apparatus for conducting a refractory metal deposition process

Structure for filtering CVD chamber process gases

Remote measurement of temperature

Patents Applicationslast 30 patents

DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT

DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT

FAULT DETECTION APPARATUSES AND METHODS FOR FAULT DETECTION OF SEMI...

FAULT DETECTION APPARATUSES AND METHODS FOR FAULT DETECTION OF SEMI...