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Keith Harvey
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Los Gatos, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Backflush chamber clean
Patent number
7,037,376
Issue date
May 2, 2006
Applied Materials Inc.
Keith Harvey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
UV radiation source for densification of CVD carbon-doped silicon o...
Patent number
6,614,181
Issue date
Sep 2, 2003
Applied Materials, Inc.
Keith R. Harvey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for densification of CVD carbon-doped silicon oxide films th...
Patent number
6,566,278
Issue date
May 20, 2003
Applied Materials Inc.
Keith R. Harvey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Closed loop clean gas control
Publication number
20060021633
Publication date
Feb 2, 2006
Applied Materials, Inc.
Keith R. Harvey
B08 - CLEANING
Information
Patent Application
Reduction of reactive gas attack on substrate heater
Publication number
20060005856
Publication date
Jan 12, 2006
Applied Materials, Inc.
David Sun
B08 - CLEANING
Information
Patent Application
Backflush chamber clean
Publication number
20040200499
Publication date
Oct 14, 2004
Applied Materials, Inc.
Keith Harvey
B08 - CLEANING