Keith J. Machia

Follow

Person

Swanton, VT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Contact hole profile and line edge width metrology for critical ima...
- Patent number 6,944,578
- Issue date Sep 13, 2005
- International Business Machines Corporation
- Reginald R. Bowley, Jr.
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Contact hole profile and line edge width metrology for critical ima...
- Patent number 6,917,901
- Issue date Jul 12, 2005
- International Business Machines Corporation
- Reginald R. Bowley, Jr.
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of photolithographic exposure dose control as a function of...
- Patent number 6,856,378
- Issue date Feb 15, 2005
- International Business Machines Corporation
- Keith J. Machia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of photolithographic exposure dose control as a function of...
- Patent number 6,674,516
- Issue date Jan 6, 2004
- International Business Machines Corporation
- Keith J. Machia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Contact hole profile and line edge width metrology for critical ima...
- Publication number 20040267506
- Publication date Dec 30, 2004
- International Business Machines Corporation
- Reginald R. Bowley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of photolithographic exposure dose control as a function of...
- Publication number 20040080738
- Publication date Apr 29, 2004
- International Business Machines Corporation
- Keith J. Machia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Contact hole profile and line edge width metrology for critical ima...
- Publication number 20030158710
- Publication date Aug 21, 2003
- International Business Machines Corporation
- Reginald R. Bowley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of photolithographic exposure dose control as a function of...
- Publication number 20030156267
- Publication date Aug 21, 2003
- International Business Machines Corporation
- Keith J. Machia
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY