Keith Kuang-Kuo KOAI

Person

Zhubei City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Shower head structure and plasma processing apparatus using the same
- Patent number 11,859,284
- Issue date Jan 2, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Huan-Chieh Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Extreme ultraviolet light reflective structure including nano-latti...
- Patent number 11,762,280
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Benny Ku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aluminum apparatus with aluminum oxide layer and method for forming...
- Patent number 11,699,574
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ru-Chien Chiu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Wet chemical heating system and a method of chemical mechanical pol...
- Patent number 11,517,995
- Issue date Dec 6, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ji James Cui
- B24 - GRINDING POLISHING
Information Patent Grant
Extreme ultraviolet light reflective structure including nano-latti...
- Patent number 11,454,877
- Issue date Sep 27, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Benny Ku
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for fabricating a semiconductor structure and method of f...
- Patent number 11,443,923
- Issue date Sep 13, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Keith Kuang-Kuo Koai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning semiconductor equipment
- Patent number 11,318,506
- Issue date May 3, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Shih-Kuo Liu
- B08 - CLEANING
Information Patent Grant
Chemical vapor deposition apparatus and blocker plate
- Patent number 11,214,868
- Issue date Jan 4, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Huan-Chieh Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for inspecting a wafer process chamber
- Patent number 11,067,515
- Issue date Jul 20, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Stanley Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for fabricating a semiconductor device
- Patent number 10,876,208
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kai-Hsiang Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for polarizing a semiconductor wafer and method for fabri...
- Patent number 10,868,241
- Issue date Dec 15, 2020
- Taiwan Semiconductor Manufacturing Company Ltd.
- Jim-Wei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aluminum apparatus with aluminum oxide layer and method for forming...
- Patent number 10,784,087
- Issue date Sep 22, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ru-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition device structure
- Patent number 10,626,499
- Issue date Apr 21, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen-Chan Lo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for manufacturing a semiconductor structure
- Patent number 10,269,573
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company Ltd.
- Kun-Mo Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aluminum apparatus with aluminum oxide layer and method for forming...
- Patent number 10,262,839
- Issue date Apr 16, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ru-Chien Chiu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Semiconductor device metallization systems and methods
- Patent number 9,548,241
- Issue date Jan 17, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiang-Huan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device metallization systems and methods
- Patent number 9,318,364
- Issue date Apr 19, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiang-Huan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-high vacuum (UHV) wafer processing
- Patent number 9,281,221
- Issue date Mar 8, 2016
- Taiwan Semiconductor Manufacturing Company Limited
- Chung-En Kao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME
- Publication number 20240084450
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- HUAN-CHIEH CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTREME ULTRAVIOLET LIGHT REFLECTIVE STRUCTURE INCLUDING NANO-LATTI...
- Publication number 20230375909
- Publication date Nov 23, 2023
- TAIWAN SEMICONDUCTOR MAUFACTURING COMPANY, LTD.
- Benny KU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
WET CHEMICAL HEATING SYSTEM AND A METHOD OF CHEMICAL MECHANICAL POL...
- Publication number 20230095741
- Publication date Mar 30, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- JI JAMES CUI
- B24 - GRINDING POLISHING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT REFLECTIVE STRUCTURE INCLUDING NANO-LATTI...
- Publication number 20220365416
- Publication date Nov 17, 2022
- TAIWAN SEMICONDUCTOR MAUFACTURING COMPANY, LTD.
- Benny KU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR FABRICATING A SEMICONDUCTOR STRUCTURE AND METHOD OF F...
- Publication number 20220359169
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- KEITH KUANG-KUO KOAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR CLEANING SEMICONDUCTOR EQUIPMENT
- Publication number 20220250124
- Publication date Aug 11, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- SHIH-KUO LIU
- B08 - CLEANING
Information Patent Application
APPARATUS FOR FABRICATING A SEMICONDUCTOR STRUCTURE AND METHOD OF F...
- Publication number 20210090935
- Publication date Mar 25, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- KEITH KUANG-KUO KOAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME
- Publication number 20210054506
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- HUAN-CHIEH CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM APPARATUS WITH ALUMINUM OXIDE LAYER AND METHOD FOR FORMING...
- Publication number 20210005433
- Publication date Jan 7, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ru-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR POLARIZING A SEMICONDUCTOR WAFER AND METHOD FOR FABRI...
- Publication number 20200365797
- Publication date Nov 19, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- JIM-WEI WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT REFLECTIVE STRUCTURE INCLUDING NANO-LATTI...
- Publication number 20200133112
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Benny KU
- G02 - OPTICS
Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS AND BLOCKER PLATE
- Publication number 20200131640
- Publication date Apr 30, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- HUAN-CHIEH CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WET CHEMICAL HEATING SYSTEM AND A METHOD OF CHEMICAL MECHANICAL POL...
- Publication number 20200070301
- Publication date Mar 5, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- JI JAMES CUI
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS FOR CLEANING SEMICONDUCTOR EQUIPMENT
- Publication number 20200055102
- Publication date Feb 20, 2020
- Taiwan Semiconductor Manufacturing company Ltd.
- SHIH-KUO LIU
- B08 - CLEANING
Information Patent Application
ALUMINUM APPARATUS WITH ALUMINUM OXIDE LAYER AND METHOD FOR FORMING...
- Publication number 20190237304
- Publication date Aug 1, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ru-Chien CHIU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE
- Publication number 20190218665
- Publication date Jul 18, 2019
- Taiwan Semiconductor Manufacturing company Ltd.
- KAI-HSIANG CHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR INSPECTING A WAFER PROCESS CHAMBER
- Publication number 20190162675
- Publication date May 30, 2019
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Stanley SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION DEVICE STRUCTURE
- Publication number 20190032215
- Publication date Jan 31, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen-Chan LO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALUMINUM APPARATUS WITH ALUMINUM OXIDE LAYER AND METHOD FOR FORMING...
- Publication number 20170358430
- Publication date Dec 14, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ru-Chien CHIU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Semiconductor Device Metallization Systems and Methods
- Publication number 20160181152
- Publication date Jun 23, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiang-Huan Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE
- Publication number 20150279632
- Publication date Oct 1, 2015
- Taiwan Semiconductor Manufacturing company Ltd.
- KUN-MO LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor Device Metallization Systems and Methods
- Publication number 20150197849
- Publication date Jul 16, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiang-Huan Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRA-HIGH VACUUM (UHV) WAFER PROCESSING
- Publication number 20140140792
- Publication date May 22, 2014
- Taiwan Semiconductor Manufacturing Company Limited
- Chung-En Kao
- H01 - BASIC ELECTRIC ELEMENTS

Keith Kuang-Kuo KOAI

Person

Patents Grantslast 30 patents

Shower head structure and plasma processing apparatus using the same

Extreme ultraviolet light reflective structure including nano-latti...

Aluminum apparatus with aluminum oxide layer and method for forming...

Wet chemical heating system and a method of chemical mechanical pol...

Extreme ultraviolet light reflective structure including nano-latti...

Apparatus for fabricating a semiconductor structure and method of f...

Apparatus for cleaning semiconductor equipment

Chemical vapor deposition apparatus and blocker plate

Apparatus and method for inspecting a wafer process chamber

Apparatus and method for fabricating a semiconductor device

Apparatus for polarizing a semiconductor wafer and method for fabri...

Aluminum apparatus with aluminum oxide layer and method for forming...

Deposition device structure

Device and method for manufacturing a semiconductor structure

Aluminum apparatus with aluminum oxide layer and method for forming...

Semiconductor device metallization systems and methods

Semiconductor device metallization systems and methods

Ultra-high vacuum (UHV) wafer processing

Patents Applicationslast 30 patents

SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME

EXTREME ULTRAVIOLET LIGHT REFLECTIVE STRUCTURE INCLUDING NANO-LATTI...

WET CHEMICAL HEATING SYSTEM AND A METHOD OF CHEMICAL MECHANICAL POL...

EXTREME ULTRAVIOLET LIGHT REFLECTIVE STRUCTURE INCLUDING NANO-LATTI...

APPARATUS FOR FABRICATING A SEMICONDUCTOR STRUCTURE AND METHOD OF F...

APPARATUS FOR CLEANING SEMICONDUCTOR EQUIPMENT

APPARATUS FOR FABRICATING A SEMICONDUCTOR STRUCTURE AND METHOD OF F...

SHOWER HEAD STRUCTURE AND PLASMA PROCESSING APPARATUS USING THE SAME

ALUMINUM APPARATUS WITH ALUMINUM OXIDE LAYER AND METHOD FOR FORMING...

APPARATUS FOR POLARIZING A SEMICONDUCTOR WAFER AND METHOD FOR FABRI...

EXTREME ULTRAVIOLET LIGHT REFLECTIVE STRUCTURE INCLUDING NANO-LATTI...

CHEMICAL VAPOR DEPOSITION APPARATUS AND BLOCKER PLATE

WET CHEMICAL HEATING SYSTEM AND A METHOD OF CHEMICAL MECHANICAL POL...

APPARATUS FOR CLEANING SEMICONDUCTOR EQUIPMENT

ALUMINUM APPARATUS WITH ALUMINUM OXIDE LAYER AND METHOD FOR FORMING...

APPARATUS AND METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE

APPARATUS AND METHOD FOR INSPECTING A WAFER PROCESS CHAMBER

DEPOSITION DEVICE STRUCTURE

ALUMINUM APPARATUS WITH ALUMINUM OXIDE LAYER AND METHOD FOR FORMING...

Semiconductor Device Metallization Systems and Methods

DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE

Semiconductor Device Metallization Systems and Methods

ULTRA-HIGH VACUUM (UHV) WAFER PROCESSING