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Keith Wood
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Sunnyvale, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Buffer station for thermal control of semiconductor substrates tran...
Patent number
9,673,071
Issue date
Jun 6, 2017
Lam Research Corporation
Keith Freeman Wood
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Loadlock designs and methods for using same
Patent number
8,491,248
Issue date
Jul 23, 2013
Novellus Systems, Inc.
Chris Gage
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Loadlock designs and methods for using same
Patent number
8,033,769
Issue date
Oct 11, 2011
Novellus Systems, Inc.
Chris Gage
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
MESC seal, O-ring carrier
Patent number
6,722,665
Issue date
Apr 20, 2004
Novellus Systems, Inc.
Christopher W. Burkhart
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Patents Applications
last 30 patents
Information
Patent Application
BUFFER STATION FOR THERMAL CONTROL OF SEMICONDUCTOR SUBSTRATES TRAN...
Publication number
20160118280
Publication date
Apr 28, 2016
LAM RESEARCH CORPORATION
Keith Freeman Wood
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOADLOCK DESIGNS AND METHODS FOR USING SAME
Publication number
20120003063
Publication date
Jan 5, 2012
Chris Gage
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Loadlock designs and methods for using same
Publication number
20090142167
Publication date
Jun 4, 2009
Novellus Systems, Inc.
Chris Gage
H01 - BASIC ELECTRIC ELEMENTS