Keiya Saito

Person

Hiratsuka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Scatterometry method and device for inspecting patterned medium
- Patent number 8,411,928
- Issue date Apr 2, 2013
- Hitachi High-Technologies Corporation
- Hideaki Sasazawa
- G11 - INFORMATION STORAGE
Information Patent Grant
Pattern shape inspection method and apparatus thereof
- Patent number 8,260,029
- Issue date Sep 4, 2012
- Hitachi High-Technologies Corporation
- Keiya Saito
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for reviewing defect
- Patent number 8,045,146
- Issue date Oct 25, 2011
- Hitachi High-Technologies Corporation
- Keiya Saito
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for inspecting a pattern shape
- Patent number 8,040,772
- Issue date Oct 18, 2011
- Hitachi High-Technologies Corporation
- Keiya Saito
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for optically detecting height of a specimen and charged par...
- Patent number 7,599,076
- Issue date Oct 6, 2009
- Hitachi High-Technologies Corporation
- Keiya Saito
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measuring thickness of thin film and devic...
- Patent number 7,119,908
- Issue date Oct 10, 2006
- Hitachi, Ltd.
- Mineo Nomoto
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for measuring thickness of thin film and devic...
- Patent number 7,057,744
- Issue date Jun 6, 2006
- Hitachi, Ltd.
- Mineo Nomoto
- B24 - GRINDING POLISHING
Information Patent Grant
IC wiring connecting method using focused energy beams
- Patent number 5,824,598
- Issue date Oct 20, 1998
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
IC wiring connecting method and apparatus
- Patent number 5,497,034
- Issue date Mar 5, 1996
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
IC wiring connecting method and apparatus
- Patent number 5,472,507
- Issue date Dec 5, 1995
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for processing a fine pattern
- Patent number 5,116,782
- Issue date May 26, 1992
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device having superlattice structure, and method of and apparatus f...
- Patent number 5,113,072
- Issue date May 12, 1992
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of manufacturing devices having superlattice structures
- Patent number 4,983,540
- Issue date Jan 8, 1991
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for correcting defects of X-ray mask
- Patent number 4,933,565
- Issue date Jun 12, 1990
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of correcting defect in circuit pattern
- Patent number 4,925,755
- Issue date May 15, 1990
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
IC wiring connecting method and resulting article
- Patent number 4,868,068
- Issue date Sep 19, 1989
- Hitachi, Ltd.
- Hiroshi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for testing pattern of a printed circuit board
- Patent number 4,700,225
- Issue date Oct 13, 1987
- Hitachi, Ltd.
- Yasuhiko Hara
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detecting defects of printed circuit patterns
- Patent number 4,654,583
- Issue date Mar 31, 1987
- Hitachi, Ltd.
- Takanori Ninomiya
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR REVIEWING DEFECT
- Publication number 20120008132
- Publication date Jan 12, 2012
- Keiya SAITO
- G02 - OPTICS
Information Patent Application
PATTERN SHAPE INSPECTION METHOD AND APPARATUS THEREOF
- Publication number 20100124370
- Publication date May 20, 2010
- Keiya SAITO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR INSPECTING PATTERNED MEDIUM
- Publication number 20100098320
- Publication date Apr 22, 2010
- Hitachi High-Technologies Corporation
- Hideaki SASAZAWA
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR INSPECTING A PATTERN SHAPE
- Publication number 20090262621
- Publication date Oct 22, 2009
- Keiya SAITO
- G01 - MEASURING TESTING
Information Patent Application
Method and Apparatus for Reviewing Defect
- Publication number 20090002695
- Publication date Jan 1, 2009
- Keiya SAITO
- G02 - OPTICS
Information Patent Application
Method for optically detecting height of a specimen and charged par...
- Publication number 20070109557
- Publication date May 17, 2007
- Keiya Saito
- G01 - MEASURING TESTING
Information Patent Application
Method and apparatus for measuring thickness of thin film and devic...
- Publication number 20050117164
- Publication date Jun 2, 2005
- Hitachi, Ltd
- Mineo Nomoto
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for measuring thickness of thin film and devic...
- Publication number 20030022400
- Publication date Jan 30, 2003
- Hitachi, Ltd
- Mineo Nomoto
- G01 - MEASURING TESTING

Keiya Saito

Person

Patents Grantslast 30 patents

Scatterometry method and device for inspecting patterned medium

Pattern shape inspection method and apparatus thereof

Method and apparatus for reviewing defect

Method and apparatus for inspecting a pattern shape

Method for optically detecting height of a specimen and charged par...

Method and apparatus for measuring thickness of thin film and devic...

Method and apparatus for measuring thickness of thin film and devic...

IC wiring connecting method using focused energy beams

IC wiring connecting method and apparatus

IC wiring connecting method and apparatus

Method and apparatus for processing a fine pattern

Device having superlattice structure, and method of and apparatus f...

Method of manufacturing devices having superlattice structures

Method and apparatus for correcting defects of X-ray mask

Method of correcting defect in circuit pattern

IC wiring connecting method and resulting article

Method and apparatus for testing pattern of a printed circuit board

Method and apparatus for detecting defects of printed circuit patterns

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR REVIEWING DEFECT

PATTERN SHAPE INSPECTION METHOD AND APPARATUS THEREOF

METHOD AND DEVICE FOR INSPECTING PATTERNED MEDIUM

METHOD AND APPARATUS FOR INSPECTING A PATTERN SHAPE

Method and Apparatus for Reviewing Defect

Method for optically detecting height of a specimen and charged par...

Method and apparatus for measuring thickness of thin film and devic...

Method and apparatus for measuring thickness of thin film and devic...