Keizo Hasebe

Person

Kofu-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,503,003
- Issue date Jan 7, 2003
- Tokyo Electron Limited
- Keizo Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 6,228,561
- Issue date May 8, 2001
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing system having process solution deaeration mechanism
- Patent number 6,217,657
- Issue date Apr 17, 2001
- Tokyo Electron Limited
- Yukio Kiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming coating film and apparatus therefor
- Patent number 6,063,190
- Issue date May 16, 2000
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing apparatus
- Patent number 6,033,475
- Issue date Mar 7, 2000
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Solvent and resist spin coating apparatus
- Patent number 5,942,035
- Issue date Aug 24, 1999
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Resist processing method and resist processing system
- Patent number 5,866,307
- Issue date Feb 2, 1999
- Tokyo Electron Limited
- Yukio Kiba
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing system
- Patent number 5,826,129
- Issue date Oct 20, 1998
- Tokyo Electron Limited
- Keizo Hasebe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming coating film and apparatus therefor
- Patent number 5,658,615
- Issue date Aug 19, 1997
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid coating system
- Patent number 5,374,312
- Issue date Dec 20, 1994
- Tokyo Electron Limited
- Keizo Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for applying a liquid
- Patent number 5,252,137
- Issue date Oct 12, 1993
- Tokyo Electron Limited
- Kiyohisa Tateyama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Film forming method and film forming apparatus
- Publication number 20010014224
- Publication date Aug 16, 2001
- Keizo Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Film forming method and film forming apparatus
- Publication number 20010009135
- Publication date Jul 26, 2001
- Keizo Hasebe
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Keizo Hasebe

Person

Patents Grantslast 30 patents

Film forming method and film forming apparatus

Film forming method and film forming apparatus

Resist processing system having process solution deaeration mechanism

Method of forming coating film and apparatus therefor

Resist processing apparatus

Solvent and resist spin coating apparatus

Resist processing method and resist processing system

Substrate processing system

Method of forming coating film and apparatus therefor

Liquid coating system

System and method for applying a liquid

Patents Applicationslast 30 patents

Film forming method and film forming apparatus

Film forming method and film forming apparatus