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Higashiyamato, JP
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last 30 patents
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Patent Grant
Projection aligner method utilizing monitoring of light quantity
Patent number
4,780,606
Issue date
Oct 25, 1988
Hitachi, Ltd.
Koyo Morita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection aligner with a sensor for monitoring light quantity
Patent number
4,701,608
Issue date
Oct 20, 1987
Hitachi, Ltd.
Koyo Morita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection aligner
Patent number
4,598,197
Issue date
Jul 1, 1986
Hitachi, Ltd.
Koyo Morita
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY