Keji Horioka

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Mihama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Magnetically enhanced plasma oxide etch using hexafluorobutadiene
- Patent number 6,613,689
- Issue date Sep 2, 2003
- Applied Materials, Inc.
- Jingbao Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced plasma etch process using a heavy fluorocarbo...
- Patent number 6,451,703
- Issue date Sep 17, 2002
- Applied Materials, Inc.
- Jingbao Liu
- H01 - BASIC ELECTRIC ELEMENTS