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San Francisco, CA, US
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last 30 patents
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Patent Grant
Low profile thick film heaters in multi-slot bake chamber
Patent number
6,506,994
Issue date
Jan 14, 2003
Applied Materials, Inc.
Yen-Kun Victor Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Integration of remote plasma generator with semiconductor processin...
Patent number
6,387,207
Issue date
May 14, 2002
Applied Materials, Inc.
Karthik Janakiraman
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
LOW PROFILE THICK FILM HEATERS IN MULTI-SLOT BAKE CHAMBER
Publication number
20020190051
Publication date
Dec 19, 2002
APPLIED MATERIALS, INC.
Yen-Kun Victor Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...