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Kelly W. Fong
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San Mateo, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Edge rings for electrostatic chucks
Patent number
8,469,368
Issue date
Jun 25, 2013
Lam Research Corporation
Ian Jared Kenworthy
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Patent Grant
Aluminum-plated components of semiconductor material and methods of...
Patent number
8,282,987
Issue date
Oct 9, 2012
Lam Research Corporation
Ian J. Kenworthy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Aluminum-plated components of semiconductor material processing app...
Patent number
8,128,750
Issue date
Mar 6, 2012
Lam Research Corporation
Ian J. Kenworthy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
ALUMINUM-PLATED COMPONENTS OF SEMICONDUCTOR MATERIAL PROCESSING APP...
Publication number
20120132532
Publication date
May 31, 2012
LAM RESEARCH CORPORATION
Ian J. Kenworthy
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
EDGE RINGS FOR ELECTROSTATIC CHUCKS
Publication number
20100044974
Publication date
Feb 25, 2010
LAM RESEARCH CORPORATION
Ian Jared Kenworthy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Aluminum-plated components of semiconductor material processing app...
Publication number
20080241517
Publication date
Oct 2, 2008
LAM RESEARCH CORPORATION
Ian J. Kenworthy
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR