Kelvin Kyaw ZIN

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Peabody, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of etching a thin film using pressure modulation
- Patent number 8,809,196
- Issue date Aug 19, 2014
- Tokyo Electron Limited
- Kelvin Kyaw Zin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of pattern etching a dielectric film while removing a mask l...
- Patent number 8,252,192
- Issue date Aug 28, 2012
- Tokyo Electron Limited
- Yao-Sheng Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low damage method for ashing a substrate using CO2/CO-based process
- Patent number 7,637,269
- Issue date Dec 29, 2009
- Tokyo Electron Limited
- Kelvin Zin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating a dielectric film to reduce damage
- Patent number 7,622,390
- Issue date Nov 24, 2009
- Tokyo Electron Limited
- Kelvin Kyaw Zin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method of pattern etching a dielectric film while removing a mask l...
- Publication number 20100243604
- Publication date Sep 30, 2010
- TOKYO ELECTRON LIMITED
- Yao-Sheng LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of etching a thin film using pressure modulation
- Publication number 20100178770
- Publication date Jul 15, 2010
- TOKYO ELECTRON LIMITED
- Kelvin Kyaw Zin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXYGEN-CONTAINING PLASMA FLASH PROCESS FOR REDUCED MICRO-LOADING EF...
- Publication number 20090246713
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Kelvin Zin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for treating a dielectric film to reduce damage
- Publication number 20080311755
- Publication date Dec 18, 2008
- TOKYO ELECTRON LIMITED
- Kelvin Kyaw ZIN
- H01 - BASIC ELECTRIC ELEMENTS