Ken Aihara

Person

Annaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing silicon epitaxial wafer
- Patent number 7,713,851
- Issue date May 11, 2010
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka Kume
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing annealed wafer and annealed wafer
- Patent number 7,189,293
- Issue date Mar 13, 2007
- Shin-Etsu Handotai Co., Ltd.
- Norihiro Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing silicon wafer and silicon wafer
- Patent number 7,078,357
- Issue date Jul 18, 2006
- Shin-Etsu Handotai Co., Ltd.
- Satoshi Tobe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon single crystal wafer for epitaxial wafer, epitaxial wafer,...
- Patent number 6,548,035
- Issue date Apr 15, 2003
- Shin-Etsu Handotai Co., Ltd.
- Akihiro Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Production method for silicon wafer and silicon wafer
- Patent number 6,544,656
- Issue date Apr 8, 2003
- Shin-Etsu Handotai Co., Ltd.
- Takao Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gallium phosphide luminescent device
- Patent number 6,479,312
- Issue date Nov 12, 2002
- Shin-Etsu Handotai Co., Ltd.
- Masato Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon single crystal wafer, epitaxial silicon wafer, and methods...
- Patent number 6,478,883
- Issue date Nov 12, 2002
- Shin-Etsu Handotai Co., Ltd.
- Masaro Tamatsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for heat treatment of silicon substrate, substrate treated b...
- Patent number 6,264,906
- Issue date Jul 24, 2001
- Shin-Etsu Handotai Co., Ltd.
- Ken Aihara
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of determining oxygen precipitation behavior in a silicon mo...
- Patent number 6,206,961
- Issue date Mar 27, 2001
- Shin-Etsu Handotai Co., Ltd.
- Hiroshi Takeno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing an epitaxial silicon single crystal wafer and...
- Patent number 6,162,708
- Issue date Dec 19, 2000
- Shin-Etsu Handotai Co., Ltd.
- Masaro Tamatsuka
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for heat treatment of silicon substrate, substrate treated b...
- Patent number 6,143,071
- Issue date Nov 7, 2000
- Shin-Etsu Handotai Co., Ltd.
- Ken Aihara
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of evaluating silicon wafers
- Patent number 5,533,387
- Issue date Jul 9, 1996
- Shin-Etsu Handotai Co., Ltd.
- Ken Aihara
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Vertical Boat for Heat Treatment and a Method for Heat Treatment
- Publication number 20090008346
- Publication date Jan 8, 2009
- SHIN-ETSU HANDOTAI CO, LTD.
- Ken Aihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Silicon Epitaxial Wafer And Manufacturing Method Thereof
- Publication number 20080038526
- Publication date Feb 14, 2008
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka Kume
- C30 - CRYSTAL GROWTH
Information Patent Application
Silicon Epitaxial Wafer and Manufacturing Method Thereof
- Publication number 20070269338
- Publication date Nov 22, 2007
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka Kume
- C30 - CRYSTAL GROWTH
Information Patent Application
Method of manufacturing silicon epitaxial wafer
- Publication number 20070243699
- Publication date Oct 18, 2007
- Shin-Etsu Handotai Co., Ltd.
- Fumitaka Kume
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Production method for anneal wafer and anneal wafer
- Publication number 20040231759
- Publication date Nov 25, 2004
- Norihiro Kobayashi
- C30 - CRYSTAL GROWTH
Information Patent Application
Production method for silicon wafer and silicon wafer
- Publication number 20040102056
- Publication date May 27, 2004
- Satoshi Tobe
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Method of manufacturing silicon epitaxial wafer

Method of producing annealed wafer and annealed wafer

Method for manufacturing silicon wafer and silicon wafer

Silicon single crystal wafer for epitaxial wafer, epitaxial wafer,...

Production method for silicon wafer and silicon wafer

Gallium phosphide luminescent device

Silicon single crystal wafer, epitaxial silicon wafer, and methods...

Method for heat treatment of silicon substrate, substrate treated b...

Method of determining oxygen precipitation behavior in a silicon mo...

Method for producing an epitaxial silicon single crystal wafer and...

Method for heat treatment of silicon substrate, substrate treated b...

Method of evaluating silicon wafers

Patents Applicationslast 30 patents

Vertical Boat for Heat Treatment and a Method for Heat Treatment

Silicon Epitaxial Wafer And Manufacturing Method Thereof

Silicon Epitaxial Wafer and Manufacturing Method Thereof

Method of manufacturing silicon epitaxial wafer

Production method for anneal wafer and anneal wafer

Production method for silicon wafer and silicon wafer