TREA

Ken Edward Tokunaga

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  • Fremont, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Focus rings
    • Patent number 6,039,836
    • Issue date Mar 21, 2000
    • Lam Research Corporation
    • Rajinder Dhindsa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer electrical discharge control by wafer lifter system
    • Patent number 5,904,779
    • Issue date May 18, 1999
    • Lam Research Corporation
    • Rajinder Dhindsa
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Negative offset bipolar electrostatic chucks
    • Patent number 5,835,333
    • Issue date Nov 10, 1998
    • Lam Research Corporation
    • Edward Ross Castro
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Dynamic feedback electrostatic wafer chuck
    • Patent number 5,812,361
    • Issue date Sep 22, 1998
    • Lam Research Corporation
    • Phillip Lawrence Jones
    • H01 - BASIC ELECTRIC ELEMENTS