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Ken Edward Tokunaga
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Fremont, CA, US
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last 30 patents
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Patent number
6,039,836
Issue date
Mar 21, 2000
Lam Research Corporation
Rajinder Dhindsa
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer electrical discharge control by wafer lifter system
Patent number
5,904,779
Issue date
May 18, 1999
Lam Research Corporation
Rajinder Dhindsa
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Patent Grant
Negative offset bipolar electrostatic chucks
Patent number
5,835,333
Issue date
Nov 10, 1998
Lam Research Corporation
Edward Ross Castro
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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Patent Grant
Dynamic feedback electrostatic wafer chuck
Patent number
5,812,361
Issue date
Sep 22, 1998
Lam Research Corporation
Phillip Lawrence Jones
H01 - BASIC ELECTRIC ELEMENTS