Ken Edward Tokunaga

Person

  • Fremont, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Focus rings

    • Patent number 6,039,836
    • Issue date Mar 21, 2000
    • Lam Research Corporation
    • Rajinder Dhindsa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer electrical discharge control by wafer lifter system

    • Patent number 5,904,779
    • Issue date May 18, 1999
    • Lam Research Corporation
    • Rajinder Dhindsa
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Negative offset bipolar electrostatic chucks

    • Patent number 5,835,333
    • Issue date Nov 10, 1998
    • Lam Research Corporation
    • Edward Ross Castro
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Grant

    Dynamic feedback electrostatic wafer chuck

    • Patent number 5,812,361
    • Issue date Sep 22, 1998
    • Lam Research Corporation
    • Phillip Lawrence Jones
    • H01 - BASIC ELECTRIC ELEMENTS