Ken Hattori

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Okegawa-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 7,397,534
- Issue date Jul 8, 2008
- Nikon Corporation
- Naohiko Iwata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Periphery exposing method and apparatus therefor
- Patent number 5,361,121
- Issue date Nov 1, 1994
- Nikon Corporation
- Ken Hattori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for exposing peripheral portion of substrate
- Patent number 5,229,811
- Issue date Jul 20, 1993
- Nikon Corporation
- Ken Hattori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for positioning circular semiconductor wafers
- Patent number 5,194,743
- Issue date Mar 16, 1993
- Nikon Corporation
- Masaaki Aoyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 5,168,304
- Issue date Dec 1, 1992
- Nikon Corporation
- Ken Hattori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Exposure apparatus and device manufacturing method
- Publication number 20060077368
- Publication date Apr 13, 2006
- Nikon Corporation
- Naohiko Iwata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and its making method, substrate carrying method...
- Publication number 20040075822
- Publication date Apr 22, 2004
- Nikon Corporation
- Ken Hattori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, holder container, device manufacturing method,...
- Publication number 20020074635
- Publication date Jun 20, 2002
- Nikon Corporation
- Ken Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure apparatus, lithography system and conveying method, and de...
- Publication number 20020024647
- Publication date Feb 28, 2002
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY