Ken Horiuchi

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas supply method
- Patent number 9,732,909
- Issue date Aug 15, 2017
- Tokyo Electron Limited
- Shinichiro Hayasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and maintenance method thereof
- Patent number 9,613,837
- Issue date Apr 4, 2017
- Tokyo Electron Limited
- Shigeru Senzaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
- Patent number 8,790,529
- Issue date Jul 29, 2014
- Tokyo Electron Limited
- Shinichiro Hayasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply system, substrate processing apparatus and gas supply me...
- Patent number 7,896,967
- Issue date Mar 1, 2011
- Tokyo Electron Limited
- Shinichiro Hayasaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND MAINTENANCE METHOD THEREOF
- Publication number 20150086302
- Publication date Mar 26, 2015
- TOKYO ELECTRON LIMITED
- Shigeru Senzaki
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
GAS SUPPLY METHOD
- Publication number 20140332100
- Publication date Nov 13, 2014
- TOKYO ELECTRON LIMITED
- Shinichiro HAYASAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
- Publication number 20110120563
- Publication date May 26, 2011
- TOKYO ELECTRON LIMITED
- Shinichiro HAYASAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND GAS SUPPLY ME...
- Publication number 20070181255
- Publication date Aug 9, 2007
- TOKYO ELECTRON LIMITED
- Shinichiro HAYASAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...