Ken-ichiro Shinoda

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Imprint apparatus
- Patent number 11,709,421
- Issue date Jul 25, 2023
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G02 - OPTICS
Information Patent Grant
Imprint apparatus, imprint method, and method for manufacturing art...
- Patent number 11,480,872
- Issue date Oct 25, 2022
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 10,859,912
- Issue date Dec 8, 2020
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Illumination apparatus, optical apparatus, imprint apparatus, proje...
- Patent number 10,761,316
- Issue date Sep 1, 2020
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Imprint apparatus and method for producing article
- Patent number 10,386,737
- Issue date Aug 20, 2019
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 9,910,351
- Issue date Mar 6, 2018
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 9,625,837
- Issue date Apr 18, 2017
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus including alignment and overlay measurement
- Patent number 9,616,613
- Issue date Apr 11, 2017
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and article manufacturing method
- Patent number 9,541,825
- Issue date Jan 10, 2017
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus, imprint method and method of manufacturing an ar...
- Patent number 9,465,308
- Issue date Oct 11, 2016
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 8,208,126
- Issue date Jun 26, 2012
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Adjustment method, exposure method, device manufacturing method, an...
- Patent number 7,955,765
- Issue date Jun 7, 2011
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and method
- Patent number 7,385,672
- Issue date Jun 10, 2008
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method, and device manufacturing me...
- Patent number 7,242,457
- Issue date Jul 10, 2007
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for manufacturing device using the ex...
- Patent number 7,209,218
- Issue date Apr 24, 2007
- Canon Kabushiki Kaisha
- Tomoaki Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system in exposure apparatus
- Patent number 6,674,514
- Issue date Jan 6, 2004
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G02 - OPTICS
Information Patent Grant
Illumination optical system in exposure apparatus
- Patent number 6,560,044
- Issue date May 6, 2003
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND AR...
- Publication number 20240342965
- Publication date Oct 17, 2024
- Canon Kabushiki Kaisha
- Hiroki Takada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND AR...
- Publication number 20220362970
- Publication date Nov 17, 2022
- Canon Kabushiki Kaisha
- Hiroki Takada
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
COATING SOLUTION
- Publication number 20220001354
- Publication date Jan 6, 2022
- NITTETSU MINING CO., LTD.
- Hiromichi MATSUMOTO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR MANUFACTURING ART...
- Publication number 20210132492
- Publication date May 6, 2021
- Canon Kabushiki Kaisha
- Tatsuya Hayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20200319547
- Publication date Oct 8, 2020
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD
- Publication number 20190033710
- Publication date Jan 31, 2019
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MOLD, IMPRINTING METHOD, IMPRINT APPARATUS, AND METHOD FOR MANUFACT...
- Publication number 20180004091
- Publication date Jan 4, 2018
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION APPARATUS, OPTICAL APPARATUS, IMPRINT APPARATUS, PROJE...
- Publication number 20170285331
- Publication date Oct 5, 2017
- Canon Kabushiki Kaisha
- Takafumi Miyaharu
- G02 - OPTICS
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20170080633
- Publication date Mar 23, 2017
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE
- Publication number 20160363875
- Publication date Dec 15, 2016
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD AND METHOD OF MANUFACTURING AN AR...
- Publication number 20150192515
- Publication date Jul 9, 2015
- Canon Kabushiki Kaisha
- Toshiki Iwai
- G01 - MEASURING TESTING
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150014892
- Publication date Jan 15, 2015
- Canon Kabushiki Kaisha
- Ken-ichiro SHINODA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20130193602
- Publication date Aug 1, 2013
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20130181365
- Publication date Jul 18, 2013
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- B82 - NANO-TECHNOLOGY
Information Patent Application
ADJUSTMENT METHOD, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AN...
- Publication number 20090035671
- Publication date Feb 5, 2009
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20090002673
- Publication date Jan 1, 2009
- Canon Kabushiki Kaisha
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE USING THE EX...
- Publication number 20070024839
- Publication date Feb 1, 2007
- Canon Kabushiki Kaisha
- Tomoaki Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and exposure method, and device manufacturing me...
- Publication number 20050231702
- Publication date Oct 20, 2005
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method
- Publication number 20050190350
- Publication date Sep 1, 2005
- Ken-ichiro Shinoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination optical system in exposure apparatus
- Publication number 20020001134
- Publication date Jan 3, 2002
- Ken-ichiro Shinoda
- G02 - OPTICS
Information Patent Application
Illumination optical system in exposure apparatus
- Publication number 20010033433
- Publication date Oct 25, 2001
- Ken-ichiro Shinoda
- G02 - OPTICS

Ken-ichiro Shinoda

Person

Patents Grantslast 30 patents

Imprint apparatus

Imprint apparatus, imprint method, and method for manufacturing art...

Imprint apparatus, imprint method, and article manufacturing method

Illumination apparatus, optical apparatus, imprint apparatus, proje...

Imprint apparatus and method for producing article

Imprint apparatus and article manufacturing method

Imprint apparatus and method of manufacturing article

Imprint apparatus including alignment and overlay measurement

Imprint apparatus and article manufacturing method

Imprint apparatus, imprint method and method of manufacturing an ar...

Exposure apparatus and device fabrication method

Adjustment method, exposure method, device manufacturing method, an...

Exposure apparatus and method

Exposure apparatus and exposure method, and device manufacturing me...

Exposure apparatus and method for manufacturing device using the ex...

Illumination optical system in exposure apparatus

Illumination optical system in exposure apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND AR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND AR...

COATING SOLUTION

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD FOR MANUFACTURING ART...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD

MOLD, IMPRINTING METHOD, IMPRINT APPARATUS, AND METHOD FOR MANUFACT...

ILLUMINATION APPARATUS, OPTICAL APPARATUS, IMPRINT APPARATUS, PROJE...

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE

IMPRINT APPARATUS, IMPRINT METHOD AND METHOD OF MANUFACTURING AN AR...

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

ADJUSTMENT METHOD, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, AN...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

EXPOSURE APPARATUS AND METHOD FOR MANUFACTURING DEVICE USING THE EX...

Exposure apparatus and exposure method, and device manufacturing me...

Exposure apparatus and method

Illumination optical system in exposure apparatus

Illumination optical system in exposure apparatus