Ken ITABASHI

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Oshu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 10,968,515
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Eiji Kikama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD AND FILM FORMATION DEVICE
- Publication number 20220178031
- Publication date Jun 9, 2022
- Tokyo Electron Limited
- Michitaka AITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20190309420
- Publication date Oct 10, 2019
- TOKYO ELECTRON LIMITED
- Masami OIKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vertical Heat Treatment Apparatus
- Publication number 20190186014
- Publication date Jun 20, 2019
- TOKYO ELECTRON LIMITED
- Eiji Kikama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT MEMBER AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20140251209
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Tomoyuki OBU
- H01 - BASIC ELECTRIC ELEMENTS