Ken Koyanagi

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Saitama, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and filter unit
- Patent number 10,074,519
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Keiki Ito
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND FILTER UNIT
- Publication number 20150235809
- Publication date Aug 20, 2015
- TOKYO ELECTRON LIMITED
- Keiki Ito
- H01 - BASIC ELECTRIC ELEMENTS