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Kanagawa, JP
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last 30 patents
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Patent Grant
Electrostatic chuck for an electrically insulative substrate, and a...
Patent number
7,209,339
Issue date
Apr 24, 2007
ULVAC, Inc.
Tetsuo Kitabayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
Electrostatic chuck for an electrically insulative substrate, and a...
Publication number
20040218340
Publication date
Nov 4, 2004
Toto, Ltd.
Tetsuo Kitabayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR