Ken Miyagi

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Resin composition for forming phase-separated structure, method for...
- Patent number 11,780,948
- Issue date Oct 10, 2023
- Tokyo Ohka Kogyo Co., Ltd.
- Ken Miyagi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Resin composition for forming phase-separated structure, method for...
- Patent number 11,472,956
- Issue date Oct 18, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Teruaki Hayakawa
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Resin composition for forming phase-separated structure, method for...
- Patent number 11,466,114
- Issue date Oct 11, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Ken Miyagi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method of producing structure containing phase-separated structure
- Patent number 10,995,234
- Issue date May 4, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Dazai
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Resin composition for forming a phase-separated structure, and meth...
- Patent number 10,179,866
- Issue date Jan 15, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Akiya Kawaue
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of producing structure containing phase-separated structure,...
- Patent number 10,100,221
- Issue date Oct 16, 2018
- Tokyo Ohka Kogyo Co., Ltd.
- Hitoshi Yamano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing structure containing phase-separated structure...
- Patent number 10,066,096
- Issue date Sep 4, 2018
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi Kurosawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Resin composition for forming a phase-separated structure, and meth...
- Patent number 9,914,847
- Issue date Mar 13, 2018
- Tokyo Ohka Kogyo Co., Ltd.
- Akiya Kawaue
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Undercoat agent and method of forming pattern of layer containing b...
- Patent number 9,834,696
- Issue date Dec 5, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Resin composition for forming a phase-separated structure, and meth...
- Patent number 9,828,519
- Issue date Nov 28, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Akiya Kawaue
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of producing structure containing phase-separated structure...
- Patent number 9,821,338
- Issue date Nov 21, 2017
- TOKYO OHKA KOGYO., LTD.
- Hitoshi Yamano
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of producing structure containing phase-separated structure
- Patent number 9,816,003
- Issue date Nov 14, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi Kurosawa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Block copolymer-containing composition and method of reducing pattern
- Patent number 9,676,934
- Issue date Jun 13, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of producing structure containing phase-separated structure,...
- Patent number 9,475,088
- Issue date Oct 25, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi Kurosawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of producing structure containing phase-separated structure,...
- Patent number 9,442,371
- Issue date Sep 13, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Takehiro Seshimo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of producing structure containing phase-separated structure,...
- Patent number 9,206,307
- Issue date Dec 8, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Tasuku Matsumiya
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of producing structure containing phase-separation structure...
- Patent number 9,188,869
- Issue date Nov 17, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takehiro Seshimo
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Method of producing structure containing phase-separated structure,...
- Patent number 9,169,421
- Issue date Oct 27, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Tasuku Matsumiya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Solvent developable negative resist composition, resist pattern for...
- Patent number 9,134,617
- Issue date Sep 15, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for producing substrate having surface nanostructure
- Patent number 9,060,415
- Issue date Jun 16, 2015
- Riken
- Shigenori Fujikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate provided with metal nanostructure on surface thereof and...
- Patent number 9,051,648
- Issue date Jun 9, 2015
- Riken
- Shigenori Fujikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming contact hole pattern
- Patent number 9,029,262
- Issue date May 12, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Undercoat agent, and pattern formation method for layer containing...
- Patent number 9,029,073
- Issue date May 12, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Primer and pattern forming method for layer including block copolymer
- Patent number 8,999,631
- Issue date Apr 7, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of forming fine pattern, and developer
- Patent number 8,961,802
- Issue date Feb 24, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Shigenori Fujikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Primer and pattern forming method for layer including block copolymer
- Patent number 8,956,810
- Issue date Feb 17, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Senzaki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Adhesive composition and adhesive film
- Patent number 8,163,836
- Issue date Apr 24, 2012
- Tokyo Ohka Kogyo Co., Ltd.
- Koichi Misumi
- B24 - GRINDING POLISHING
Information Patent Grant
Chemically amplified positive photo resist composition and method f...
- Patent number 7,358,028
- Issue date Apr 15, 2008
- Tokyo Ohka Kogyo Co., Ltd.
- Kenji Maruyama
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate attaching method
- Patent number 7,268,061
- Issue date Sep 11, 2007
- Tokyo Ohka Kogyo Co., Ltd.
- Atsushi Miyanari
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Phenol novolak resin, production process thereof, and positive phot...
- Patent number 6,939,926
- Issue date Sep 6, 2005
- Tokyo Ohka Kogyo Co., Ltd.
- Ken Miyagi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Patents Applicationslast 30 patents

Information Patent Application
RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, AND METHOD...
- Publication number 20240425694
- Publication date Dec 26, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Ken Miyagi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIN COMPOSITION FOR FORMING ETCHING MASK PATTERN, AND METHOD FOR...
- Publication number 20240368393
- Publication date Nov 7, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Takehiro Seshimo
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD OF PRODUCING BLOCK COPOLYMER, AND BLOCK COPOLYMER
- Publication number 20240182623
- Publication date Jun 6, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Toshifumi Satoh
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD OF...
- Publication number 20240182701
- Publication date Jun 6, 2024
- Tokyo Ohka Kogyo Co., Ltd.
- Toshifumi Satoh
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
AUTHENTICATION OBJECT, AUTHENTICATION SYSTEM, AND AUTHENTICATION ME...
- Publication number 20220138305
- Publication date May 5, 2022
- Tsuyoshi KUROSAWA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD FOR...
- Publication number 20220017741
- Publication date Jan 20, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Teruaki HAYAKAWA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD FOR...
- Publication number 20210230340
- Publication date Jul 29, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Ken MIYAGI
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD OF PRODUCING PURIFIED PRODUCT OF RESIN COMPOSITION FOR FORMI...
- Publication number 20210017343
- Publication date Jan 21, 2021
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro Dazai
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD FOR...
- Publication number 20200369819
- Publication date Nov 26, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Ken Miyagi
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
RESIN COMPOSITION FOR FORMING A PHASE-SEPARATED STRUCTURE, AND METH...
- Publication number 20200183281
- Publication date Jun 11, 2020
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro DAZAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE
- Publication number 20190284387
- Publication date Sep 19, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro DAZAI
- B32 - LAYERED PRODUCTS
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE
- Publication number 20190276698
- Publication date Sep 12, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro DAZAI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE AND METHOD...
- Publication number 20180072564
- Publication date Mar 15, 2018
- Tokyo Ohka Kogyo Co., Ltd.
- Ken MIYAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESIN COMPOSITION FOR FORMING A PHASE-SEPARATED STRUCTURE, AND METH...
- Publication number 20170362460
- Publication date Dec 21, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Akiya KAWAUE
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
RESIN COMPOSITION FOR FORMING A PHASE-SEPARATED STRUCTURE, AND METH...
- Publication number 20170240766
- Publication date Aug 24, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Akiya KAWAUE
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
RESIN COMPOSITION FOR FORMING A PHASE-SEPARATED STRUCTURE, AND METH...
- Publication number 20170240767
- Publication date Aug 24, 2017
- Tokyo Ohka Kogyo Co., Ltd.
- Akiya KAWAUE
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...
- Publication number 20160333217
- Publication date Nov 17, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Hitoshi YAMANO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE...
- Publication number 20160280906
- Publication date Sep 29, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi KUROSAWA
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
UNDERCOAT AGENT AND METHOD OF FORMING PATTERN OF LAYER CONTAINING B...
- Publication number 20160257838
- Publication date Sep 8, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Takahiro SENZAKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
BRUSH COMPOSITION AND METHOD OF PRODUCING STRUCTURE CONTAINING PHAS...
- Publication number 20160194524
- Publication date Jul 7, 2016
- Tokyo Ohka Kogyo Co., Ltd.
- Hitoshi YAMANO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...
- Publication number 20150205207
- Publication date Jul 23, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takehiro Seshimo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE
- Publication number 20150118397
- Publication date Apr 30, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi Kurosawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...
- Publication number 20150093507
- Publication date Apr 2, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi Kurosawa
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...
- Publication number 20150044371
- Publication date Feb 12, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Tsuyoshi Kurosawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...
- Publication number 20150034593
- Publication date Feb 5, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Tasuku Matsumiya
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATION STRUCTURE...
- Publication number 20150034595
- Publication date Feb 5, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Takehiro Seshimo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...
- Publication number 20140238954
- Publication date Aug 28, 2014
- TOKYO INSTITUTE OF TECHNOLOGY
- Tasuku Matsumiya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESIST COMPOSITION FOR NEGATIVE DEVELOPMENT WHICH IS USED FOR FORMA...
- Publication number 20140127626
- Publication date May 8, 2014
- Riken
- Takahiro Senzaki
- B82 - NANO-TECHNOLOGY
Information Patent Application
SOLVENT DEVELOPABLE NEGATIVE RESIST COMPOSITION, RESIST PATTERN FOR...
- Publication number 20140113236
- Publication date Apr 24, 2014
- Riken
- Takahiro Senzaki
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF FORMING FINE PATTERN, AND DEVELOPER
- Publication number 20140054265
- Publication date Feb 27, 2014
- Tokyo Ohka Kogyo Co., Ltd.
- Shigenori Fujikawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Person

Patents Grantslast 30 patents

Resin composition for forming phase-separated structure, method for...

Resin composition for forming phase-separated structure, method for...

Resin composition for forming phase-separated structure, method for...

Method of producing structure containing phase-separated structure

Resin composition for forming a phase-separated structure, and meth...

Method of producing structure containing phase-separated structure,...

Method of producing structure containing phase-separated structure...

Resin composition for forming a phase-separated structure, and meth...

Undercoat agent and method of forming pattern of layer containing b...

Resin composition for forming a phase-separated structure, and meth...

Method of producing structure containing phase-separated structure...

Method of producing structure containing phase-separated structure

Block copolymer-containing composition and method of reducing pattern

Method of producing structure containing phase-separated structure,...

Method of producing structure containing phase-separated structure,...

Method of producing structure containing phase-separated structure,...

Method of producing structure containing phase-separation structure...

Method of producing structure containing phase-separated structure,...

Solvent developable negative resist composition, resist pattern for...

Method for producing substrate having surface nanostructure

Substrate provided with metal nanostructure on surface thereof and...

Method of forming contact hole pattern

Undercoat agent, and pattern formation method for layer containing...

Primer and pattern forming method for layer including block copolymer

Method of forming fine pattern, and developer

Primer and pattern forming method for layer including block copolymer

Adhesive composition and adhesive film

Chemically amplified positive photo resist composition and method f...

Substrate attaching method

Phenol novolak resin, production process thereof, and positive phot...

Patents Applicationslast 30 patents

RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, AND METHOD...

RESIN COMPOSITION FOR FORMING ETCHING MASK PATTERN, AND METHOD FOR...

METHOD OF PRODUCING BLOCK COPOLYMER, AND BLOCK COPOLYMER

RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD OF...

AUTHENTICATION OBJECT, AUTHENTICATION SYSTEM, AND AUTHENTICATION ME...

RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD FOR...

RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD FOR...

METHOD OF PRODUCING PURIFIED PRODUCT OF RESIN COMPOSITION FOR FORMI...

RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE, METHOD FOR...

RESIN COMPOSITION FOR FORMING A PHASE-SEPARATED STRUCTURE, AND METH...

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE

RESIN COMPOSITION FOR FORMING PHASE-SEPARATED STRUCTURE AND METHOD...

RESIN COMPOSITION FOR FORMING A PHASE-SEPARATED STRUCTURE, AND METH...

RESIN COMPOSITION FOR FORMING A PHASE-SEPARATED STRUCTURE, AND METH...

RESIN COMPOSITION FOR FORMING A PHASE-SEPARATED STRUCTURE, AND METH...

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE...

UNDERCOAT AGENT AND METHOD OF FORMING PATTERN OF LAYER CONTAINING B...

BRUSH COMPOSITION AND METHOD OF PRODUCING STRUCTURE CONTAINING PHAS...

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATION STRUCTURE...

METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE,...

RESIST COMPOSITION FOR NEGATIVE DEVELOPMENT WHICH IS USED FOR FORMA...

SOLVENT DEVELOPABLE NEGATIVE RESIST COMPOSITION, RESIST PATTERN FOR...

METHOD OF FORMING FINE PATTERN, AND DEVELOPER