-
-
-
-
Scanning probe microscope
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Patent number 6,745,617
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Issue date Jun 8, 2004
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Hitachi Kenki FineTech. Co., Ltd.
-
Ken Murayama
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G01 - MEASURING TESTING
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Scanning probe microscope
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Patent number 6,278,113
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Issue date Aug 21, 2001
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Hitachi Construction Machinery Co, Ltd.
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Ken Murayama
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B82 - NANO-TECHNOLOGY
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Fine positioning device
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Patent number 4,888,878
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Issue date Dec 26, 1989
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Hitachi Construction Machinery Co., Ltd.
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Kiyoshi Nagasawa
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR