Ken Nakao

Person

Yamanashi-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 8,546,185
- Issue date Oct 1, 2013
- Tokyo Electron Limited
- Ken Nakao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing furnace
- Patent number 8,476,560
- Issue date Jul 2, 2013
- Tokyo Electron Limited
- Makoto Kobayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 8,470,720
- Issue date Jun 25, 2013
- Tokyo Electron Limited
- Ken Nakao
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Semiconductor manufacturing plant
- Patent number 8,387,559
- Issue date Mar 5, 2013
- Toyo Tanso Co., Ltd.
- Jiro Hiraiwa
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Vaporizer and semiconductor processing system
- Patent number 8,197,600
- Issue date Jun 12, 2012
- Tokyo Electron Limited
- Ken Nakao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer apparatus and vertical heat processing apparatus
- Patent number 8,167,521
- Issue date May 1, 2012
- Tokyo Electron Limited
- Ken Nakao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat processing furnace and method of manufacturing the same
- Patent number 8,134,100
- Issue date Mar 13, 2012
- Tokyo Electron Limited
- Makoto Kobayashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heat processing apparatus
- Patent number 8,033,823
- Issue date Oct 11, 2011
- Tokyo Electron Limited
- Ken Nakao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat-processing furnace and manufacturing method thereof
- Patent number 7,888,622
- Issue date Feb 15, 2011
- Tokyo Electron Limited
- Ken Nakao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas supply system for semiconductor manufacturing apparatus
- Patent number 7,862,638
- Issue date Jan 4, 2011
- Tokyo Electron Limited
- Shuji Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,807,587
- Issue date Oct 5, 2010
- Tokyo Electron Limited
- Hiroyuki Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reflection plate for semiconductor heat treatment and manufacturing...
- Patent number 7,336,892
- Issue date Feb 26, 2008
- Covalent Materials Corporation
- Kazuhiko Shimanuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment apparatus
- Patent number 7,311,520
- Issue date Dec 25, 2007
- Tokyo Electron Limited
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry air-supplying apparatus and treating apparatus
- Patent number 7,207,123
- Issue date Apr 24, 2007
- Tokyo Electron Limited
- Takashi Tanahashi
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Single-wafer type heat treatment apparatus for semiconductor proces...
- Patent number 7,150,628
- Issue date Dec 19, 2006
- Tokyo Electron Limited
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment system
- Patent number 7,102,104
- Issue date Sep 5, 2006
- Tokyo Electron Limited
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon wire heating object sealing heater and fluid heating apparat...
- Patent number 7,072,578
- Issue date Jul 4, 2006
- Toshiba Ceramics Co., Ltd.
- Norihiko Saito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Carbon wire heating object sealing heater and fluid heating apparat...
- Patent number 6,885,814
- Issue date Apr 26, 2005
- Toshiba Ceramics Co., Ltd.
- Takanori Saito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heater sealed with carbon wire heating element
- Patent number 6,584,279
- Issue date Jun 24, 2003
- Toshiba Ceramics Co., Ltd.
- Sunao Seko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heater
- Patent number 6,515,264
- Issue date Feb 4, 2003
- Toshiba Ceramics Co., Ltd.
- Eiichi Toya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Heater
- Patent number 6,407,371
- Issue date Jun 18, 2002
- Toshiba Ceramics Co., Ltd.
- Eiichi Toya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealing terminal
- Patent number 6,204,488
- Issue date Mar 20, 2001
- Toshiba Ceramics Co., Ltd.
- Eiichi Toya
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Heat-treating boat for semiconductor wafers
- Patent number 6,062,853
- Issue date May 16, 2000
- Tokyo Electron Limited
- Tomohisa Shimazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbon heater
- Patent number 6,043,468
- Issue date Mar 28, 2000
- Toshiba Ceramics Co., Ltd.
- Eiichi Toya
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment apparatus
- Patent number 6,008,477
- Issue date Dec 28, 1999
- Tokyo Electron Limited
- Ken Nakao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment method
- Patent number 5,813,851
- Issue date Sep 29, 1998
- Tokyo Electron, Ltd.
- Ken Nakao
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment method and device
- Patent number 5,645,419
- Issue date Jul 8, 1997
- Tokyo Electron Kabushiki Kaisha
- Tetsu Ohsawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment process for wafers
- Patent number 5,500,388
- Issue date Mar 19, 1996
- Tokyo Electron Kabushiki Kaisha
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for heat treating
- Patent number 5,431,561
- Issue date Jul 11, 1995
- Kabushiki Kaisha Toshiba
- Kikuo Yamabe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat treatment apparatus
- Patent number 5,324,920
- Issue date Jun 28, 1994
- Tokyo Electron Sagami Limited
- Ken Nakao
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
PICKUP METHOD AND PICKUP DEVICE
- Publication number 20150214088
- Publication date Jul 30, 2015
- TOKYO ELECTRON LIMITED
- Ken Nakao
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
HEAT TREATMENT DEVICE
- Publication number 20140174364
- Publication date Jun 26, 2014
- TOKYO ELECTRON LIMITED
- Ken Nakao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20120252164
- Publication date Oct 4, 2012
- TOKYO ELECTRON LIMITED
- Ken NAKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20110039420
- Publication date Feb 17, 2011
- TOKYO ELECTRON LIMITED
- Ken Nakao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING PLANT
- Publication number 20100064969
- Publication date Mar 18, 2010
- Toyo Tanso Co., Ltd.
- Jiro Hiraiwa
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20090305512
- Publication date Dec 10, 2009
- Hiroyuki Matsuura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESS APPARATUS, PLASMA PROCESS METHOD, AND OBJECT PROCESS...
- Publication number 20090246542
- Publication date Oct 1, 2009
- TOKYO ELECTRON LIMITED
- Ken Nakao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Thermal processing furnace
- Publication number 20090194521
- Publication date Aug 6, 2009
- TOKYO ELECTRON LIMITED
- Makoto Kobayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND VERTICAL HEAT PROCESSING APPARATUS
- Publication number 20090175705
- Publication date Jul 9, 2009
- Ken Nakao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat processing apparatus
- Publication number 20090136888
- Publication date May 28, 2009
- Ken Nakao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat processing furnace and method of manufacturing the same
- Publication number 20080296282
- Publication date Dec 4, 2008
- TOKYO ELECTRON LIMITED
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gas supply system and gas supply accumulation unit of semiconductor...
- Publication number 20080295963
- Publication date Dec 4, 2008
- TOKYO ELECTRON LIMITED
- Shuji Moriya
- C30 - CRYSTAL GROWTH
Information Patent Application
GAS SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20080251018
- Publication date Oct 16, 2008
- TOKYO ELECTRON LIMITED
- Shuji MORIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Vaporizer and semiconductor processing system
- Publication number 20080245306
- Publication date Oct 9, 2008
- Ken Nakao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas supply system, gas supply method, method of cleaning thin film...
- Publication number 20080105194
- Publication date May 8, 2008
- Ken Nakao
- B08 - CLEANING
Information Patent Application
Heat-processing furnace and manufacuring method thereof
- Publication number 20080073334
- Publication date Mar 27, 2008
- TOKYO ELECTRON LIMITED
- Ken Nakao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Vacuum evacuation device and method, and substrate processing appar...
- Publication number 20070048145
- Publication date Mar 1, 2007
- Katsutoshi Ishii
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
Single-wafer type heat treatment apparatus for semiconductor proces...
- Publication number 20060032072
- Publication date Feb 16, 2006
- TOKYO ELECTRON LIMITED
- Kenichi Yamaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heat treatment apparatus
- Publication number 20060021582
- Publication date Feb 2, 2006
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry air-supplying apparatus and treating apparatus
- Publication number 20050246918
- Publication date Nov 10, 2005
- Takashi Tanahashi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Carbon wire heating object sealing heater and fluid heating apparat...
- Publication number 20050133494
- Publication date Jun 23, 2005
- TOSHIBA CERAMICS CO., LTD.
- Norihiko Saito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Thermal processing apparatus and a thermal processing method
- Publication number 20050121142
- Publication date Jun 9, 2005
- Ken Nakao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat treatment system
- Publication number 20050121432
- Publication date Jun 9, 2005
- Takanori Saito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reflection plate for semiconductor heat treatment and manufacturing...
- Publication number 20030184696
- Publication date Oct 2, 2003
- TOSHIBA CERAMICS CO., LTD.
- Kazuhiko Shimanuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carbon wire heating object sealing heater and fluid heating apparat...
- Publication number 20030180034
- Publication date Sep 25, 2003
- TOSHIBA CERAMICS CO., LTD.
- Takanori Saito
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heater
- Publication number 20020162835
- Publication date Nov 7, 2002
- TOSHIBA CERAMICS CO., LTD.
- Eiichi Toya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Heater sealed with carbon wire heating element
- Publication number 20020001460
- Publication date Jan 3, 2002
- TOSHIBA CERAMICS CO., LTD. & TOKYO ELECTRON LIMITED
- Sunao Seko
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Method for manufacturing semiconductor device

Thermal processing furnace

Film forming apparatus and film forming method

Semiconductor manufacturing plant

Vaporizer and semiconductor processing system

Substrate transfer apparatus and vertical heat processing apparatus

Heat processing furnace and method of manufacturing the same

Heat processing apparatus

Heat-processing furnace and manufacturing method thereof

Gas supply system for semiconductor manufacturing apparatus

Substrate processing apparatus and substrate processing method

Reflection plate for semiconductor heat treatment and manufacturing...

Heat treatment apparatus

Dry air-supplying apparatus and treating apparatus

Single-wafer type heat treatment apparatus for semiconductor proces...

Heat treatment system

Carbon wire heating object sealing heater and fluid heating apparat...

Carbon wire heating object sealing heater and fluid heating apparat...

Heater sealed with carbon wire heating element

Heater

Heater

Sealing terminal

Heat-treating boat for semiconductor wafers

Carbon heater

Heat treatment apparatus

Heat treatment method

Heat treatment method and device

Heat treatment process for wafers

Method and apparatus for heat treating

Heat treatment apparatus

Patents Applicationslast 30 patents

PICKUP METHOD AND PICKUP DEVICE

HEAT TREATMENT DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

FILM FORMING APPARATUS AND FILM FORMING METHOD

SEMICONDUCTOR MANUFACTURING PLANT

Substrate Processing Apparatus and Substrate Processing Method

PLASMA PROCESS APPARATUS, PLASMA PROCESS METHOD, AND OBJECT PROCESS...

Thermal processing furnace

SUBSTRATE TRANSFER APPARATUS AND VERTICAL HEAT PROCESSING APPARATUS

Heat processing apparatus

Heat processing furnace and method of manufacturing the same

Gas supply system and gas supply accumulation unit of semiconductor...

GAS SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS

Vaporizer and semiconductor processing system

Gas supply system, gas supply method, method of cleaning thin film...

Heat-processing furnace and manufacuring method thereof

Vacuum evacuation device and method, and substrate processing appar...

Single-wafer type heat treatment apparatus for semiconductor proces...

Heat treatment apparatus

Dry air-supplying apparatus and treating apparatus

Carbon wire heating object sealing heater and fluid heating apparat...

Thermal processing apparatus and a thermal processing method

Heat treatment system

Reflection plate for semiconductor heat treatment and manufacturing...

Carbon wire heating object sealing heater and fluid heating apparat...

Heater

Heater sealed with carbon wire heating element