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Surface treatment apparatus
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Patent number 4,901,667
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Issue date Feb 20, 1990
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Hitachi, Ltd.
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Keizo Suzuki
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Ion source
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Patent number 4,658,143
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Issue date Apr 14, 1987
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Hitachi, Ltd.
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Katsumi Tokiguchi
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H01 - BASIC ELECTRIC ELEMENTS
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Dry-processing apparatus
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Patent number 4,624,214
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Issue date Nov 25, 1986
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Hitachi, Ltd.
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Keizo Suzuki
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H01 - BASIC ELECTRIC ELEMENTS
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Surface treatment apparatus
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Patent number 4,522,674
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Issue date Jun 11, 1985
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Hitachi, Ltd.
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Ken Ninomiya
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Microwave plasma etching
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Patent number 4,462,863
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Issue date Jul 31, 1984
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Hitachi, Ltd.
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Shigeru Nishimatsu
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H01 - BASIC ELECTRIC ELEMENTS
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Microwave plasma source
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Patent number 4,433,228
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Issue date Feb 21, 1984
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Hitachi, Ltd.
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Shigeru Nishimatsu
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H01 - BASIC ELECTRIC ELEMENTS