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Ken-Shen Chou
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Hsinchu, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for polymer dielectric surface recovery by ion...
Patent number
7,714,414
Issue date
May 11, 2010
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsiu-Mei Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Elastomer plating mask sealed wafer level package method
Patent number
6,593,220
Issue date
Jul 15, 2003
Taiwan Semiconductor Manufacturing Company
Hsiu-Mei Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process for cleaning a semiconductor substrate after chemical-mecha...
Patent number
6,099,662
Issue date
Aug 8, 2000
Taiwan Semiconductor Manufacturing Company
Ying-Lang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for reducing stress and improving step-coverage of tungsten...
Patent number
5,956,609
Issue date
Sep 21, 1999
Taiwan Semiconductor Manufacturing Company, Ltd.
Jiun-Chung Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for polymer dielectric surface recovery by ion...
Publication number
20060113640
Publication date
Jun 1, 2006
Hsiu-Mei Yu
H01 - BASIC ELECTRIC ELEMENTS