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Ken Tanaka
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Kawasaki-shi, JP
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last 30 patents
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Patent Grant
Method of forming resist pattern and negative resist composition
Patent number
8,859,187
Issue date
Oct 14, 2014
Tokyo Ohka Kogyo Co., Ltd.
Ken Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positive resist composition for thin-film implantation process and...
Patent number
7,910,281
Issue date
Mar 22, 2011
Tokyo Ohka Kogyo Co., Ltd.
Takako Suzuki
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
METHOD OF FORMING RESIST PATTERN AND NEGATIVE RESIST COMPOSITION
Publication number
20090191478
Publication date
Jul 30, 2009
Tokyo Ohka Kogyo Co., Ltd.
Ken Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE RESIST COMPOSITION FOR THIN-FILM IMPLANTATION PROCESS AND...
Publication number
20090029291
Publication date
Jan 29, 2009
Tokyo Ohka Kogyo Co., Ltd.
Takako Suzuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY