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Ken Wu
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Hsinchu County, TW
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last 30 patents
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Patent Grant
Photomask and photomask substrate with reduced light scattering pro...
Patent number
8,624,345
Issue date
Jan 7, 2014
Taiwan Semiconductor Manufacturing Co., Ltd.
Ken Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for forming a robust mask with reduced light scattering
Patent number
8,198,118
Issue date
Jun 12, 2012
Taiwan Semiconductor Manufacturing Co.
Ken Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for providing phase shift mask passivation layer
Patent number
7,727,682
Issue date
Jun 1, 2010
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Ting Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PHOTOMASK AND PHOTOMASK SUBSTRATE WITH REDUCED LIGHT SCATTERING PRO...
Publication number
20120237861
Publication date
Sep 20, 2012
Taiwan Semiconductor Manufacturing Co., LTD
Ken Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and Method for Providing Phase Shift Mask Passivation Layer
Publication number
20080233486
Publication date
Sep 25, 2008
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Ting Pan
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for forming a robust mask with reduced light scattering
Publication number
20080102379
Publication date
May 1, 2008
Ken Wu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY