Ken Yamazaki

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Kawasaki, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for rinsing plate-shaped articles and cleaning bath and clea...
- Patent number 5,927,302
- Issue date Jul 27, 1999
- Fujitsu Limited
- Yuka Hayami
- B08 - CLEANING
Information Patent Grant
Method for rinsing plate-shaped articles
- Patent number 5,474,616
- Issue date Dec 12, 1995
- Fujitsu Limited
- Yuka Hayami
- B08 - CLEANING
Information Patent Grant
Apparatus made of silica for semiconductor device fabrication
- Patent number 5,395,452
- Issue date Mar 7, 1995
- Fujitsu Limited
- Masanori Kobayashi
- C30 - CRYSTAL GROWTH