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Keng-Hsien Ho
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Taoyuan County, TW
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last 30 patents
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Patent Grant
Method and system for detecting tool errors to stop a process recip...
Patent number
7,908,024
Issue date
Mar 15, 2011
Inotera Memories, Inc.
Chun-Hsiang Chen
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
METHOD AND SYSTEM FOR DETECTING TOOL ERRORS TO STOP A PROCESS RECIP...
Publication number
20090254208
Publication date
Oct 8, 2009
INOTERA MEMORIES, INC.
Chun-Hsiang Chen
G05 - CONTROLLING REGULATING