Membership
Tour
Register
Log in
Kengo Kaneko
Follow
Person
Nirasaki-shi, JP
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Temperature controlling apparatus, temperature controlling method,...
Patent number
11,837,480
Issue date
Dec 5, 2023
Tokyo Electron Limited
Katsuyuki Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlling apparatus, temperature controlling method,...
Patent number
10,923,369
Issue date
Feb 16, 2021
Tokyo Electron Limited
Katsuyuki Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
10,361,089
Issue date
Jul 23, 2019
Tokyo Electron Limited
Kengo Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature control system and substrate processing apparatus
Patent number
7,870,751
Issue date
Jan 18, 2011
Tokyo Electron Limited
Kengo Kaneko
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Patents Applications
last 30 patents
Information
Patent Application
TEMPERATURE CONTROLLING APPARATUS, TEMPERATURE CONTROLLING METHOD,...
Publication number
20210134629
Publication date
May 6, 2021
TOKYO ELECTRON LIMITED
Katsuyuki KOIZUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20180350569
Publication date
Dec 6, 2018
TOKYO ELECTRON LIMITED
Kengo KANEKO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE CONTROLLING APPARATUS, TEMPERATURE CONTROLLING METHOD,...
Publication number
20180102267
Publication date
Apr 12, 2018
TOKYO ELECTRON LIMITED
Katsuyuki KOIZUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Temperature control system and substrate processing apparatus
Publication number
20060201172
Publication date
Sep 14, 2006
TOKYO ELECTRON LIMITED
Kengo Kaneko
F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...