Kengo Tsutsumi

Person

  • Susono-shi, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Target assembly

    • Patent number 10,435,783
    • Issue date Oct 8, 2019
    • ULVAC, Inc.
    • Shinya Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etching apparatus and etching method

    • Patent number 8,361,274
    • Issue date Jan 29, 2013
    • Samsung Electronics Co., Ltd.
    • Kwang-Myung Lee
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Vacuum processing apparatus

    • Patent number 7,682,481
    • Issue date Mar 23, 2010
    • Ulvac, Inc.
    • Seiichi Takahashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etching method

    • Patent number 7,497,963
    • Issue date Mar 3, 2009
    • Samsung Electronics Co., Ltd.
    • Kwang-Myung Lee
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Film Forming Method

    • Publication number 20220056571
    • Publication date Feb 24, 2022
    • Ulvac, Inc.
    • Kengo Tsutsumi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Target Assembly

    • Publication number 20170268097
    • Publication date Sep 21, 2017
    • Ulvac, Inc.
    • Shinya Nakamura
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum processing apparatus

    • Publication number 20070151669
    • Publication date Jul 5, 2007
    • ULVAC, Inc.
    • Seiichi Takahashi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Etching method

    • Publication number 20050153553
    • Publication date Jul 14, 2005
    • Kwang-Myung Lee
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Etching apparatus and etching method

    • Publication number 20050150861
    • Publication date Jul 14, 2005
    • Kwang-Myung Lee
    • H01 - BASIC ELECTRIC ELEMENTS