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Kengo Tsutsumi
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Susono-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Target assembly
Patent number
10,435,783
Issue date
Oct 8, 2019
ULVAC, Inc.
Shinya Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching apparatus and etching method
Patent number
8,361,274
Issue date
Jan 29, 2013
Samsung Electronics Co., Ltd.
Kwang-Myung Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus
Patent number
7,682,481
Issue date
Mar 23, 2010
Ulvac, Inc.
Seiichi Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Etching method
Patent number
7,497,963
Issue date
Mar 3, 2009
Samsung Electronics Co., Ltd.
Kwang-Myung Lee
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Film Forming Method
Publication number
20220056571
Publication date
Feb 24, 2022
Ulvac, Inc.
Kengo Tsutsumi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Target Assembly
Publication number
20170268097
Publication date
Sep 21, 2017
Ulvac, Inc.
Shinya Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vacuum processing apparatus
Publication number
20070151669
Publication date
Jul 5, 2007
ULVAC, Inc.
Seiichi Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Etching method
Publication number
20050153553
Publication date
Jul 14, 2005
Kwang-Myung Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching apparatus and etching method
Publication number
20050150861
Publication date
Jul 14, 2005
Kwang-Myung Lee
H01 - BASIC ELECTRIC ELEMENTS