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Kenichi Akamatsu
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Chiba-shi, JP
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last 30 patents
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Patent Grant
Apparatus structure and scanning probe microscope including apparat...
Patent number
7,945,964
Issue date
May 17, 2011
SII NanoTechnology Inc.
Shigeru Wakiyama
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
APPARATUS STRUCTURE AND SCANNING PROBE MICROSCOPE INCLUDING APPARAT...
Publication number
20090255016
Publication date
Oct 8, 2009
Shigeru Wakiyama
G01 - MEASURING TESTING