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Kenichi Anzai
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Yamatokohriyama-shi, JP
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last 30 patents
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Patent Grant
Method and pad for polishing wafer
Patent number
7,695,347
Issue date
Apr 13, 2010
Shin-Etsu Handotai Co., Ltd.
Hisashi Masumura
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Method and pad for polishing wafer
Publication number
20050014455
Publication date
Jan 20, 2005
Hisashi Masumura
B24 - GRINDING POLISHING