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Kenichi Hirane
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Electron microscope and electron beam detector
Patent number
9,355,815
Issue date
May 31, 2016
Hitachi High-Technologies Corporation
Shin Imamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Environmental scanning electron microcope
Patent number
7,365,323
Issue date
Apr 29, 2008
Hitachi High-Technologies Corporation
Tomohisa Ohtaki
G01 - MEASURING TESTING
Information
Patent Grant
Electron beam apparatus and high-voltage discharge prevention method
Patent number
7,274,017
Issue date
Sep 25, 2007
Hitachi High-Technologies Corporation
Akimitsu Okura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam apparatus and high-voltage discharge prevention method
Patent number
6,949,752
Issue date
Sep 27, 2005
Hitachi High-Technologies Corporation
Akimitsu Okura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electron beam lithography apparatus
Patent number
5,047,647
Issue date
Sep 10, 1991
Hitachi, Ltd.
Hiroyuki Itoh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ELECTRON MICROSCOPE AND ELECTRON BEAM DETECTOR
Publication number
20150214002
Publication date
Jul 30, 2015
Hitachi High-Technologies Corporation
Shin Imamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING ELECTRON MICROSCOPE
Publication number
20090057558
Publication date
Mar 5, 2009
HITACHI
Toru Iwaya
G01 - MEASURING TESTING
Information
Patent Application
Environmental scanning electron microscope
Publication number
20060219912
Publication date
Oct 5, 2006
Hitachi High-Technologies Corporation
Tomohisa Ohtaki
G01 - MEASURING TESTING
Information
Patent Application
Electron beam apparatus and high-voltage discharge prevention method
Publication number
20050218777
Publication date
Oct 6, 2005
Akimitsu Okura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron beam apparatus and high-voltage discharge prevention method
Publication number
20030155525
Publication date
Aug 21, 2003
Akimitsu Okura
H01 - BASIC ELECTRIC ELEMENTS