Kenichi KAGAMI

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning UV irradiation chamber
- Patent number 7,789,965
- Issue date Sep 7, 2010
- ASM Japan K.K.
- Kiyohiro Matsushita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
UV light irradiating apparatus with liquid filter
- Patent number 7,763,869
- Issue date Jul 27, 2010
- ASM Japan K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming insulation film
- Patent number 7,582,575
- Issue date Sep 1, 2009
- ASM Japan K.K.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for managing UV irradiation for curing semiconductor substrate
- Patent number 7,501,292
- Issue date Mar 10, 2009
- ASM Japan K.K.
- Kiyohiro Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a thin film by plasma CVD of a silicon-containing...
- Patent number 7,229,935
- Issue date Jun 12, 2007
- ASM Japan K.K.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning a CVD reaction chamber using an active oxygen sp...
- Patent number 6,767,836
- Issue date Jul 27, 2004
- ASM Japan K.K.
- Nelson Loke Chou San
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CURING MATERIA...
- Publication number 20090093134
- Publication date Apr 9, 2009
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CURING MATERIA...
- Publication number 20090093135
- Publication date Apr 9, 2009
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANAGING UV IRRADIATION FOR CURING SEMICONDUCTOR SUBSTRATE
- Publication number 20090023229
- Publication date Jan 22, 2009
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV LIGHT IRRADIATING APPARATUS WITH LIQUID FILTER
- Publication number 20080230721
- Publication date Sep 25, 2008
- ASM JAPAN K.K.
- Kiyohiro MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING UV IRRADIATION CHAMBER
- Publication number 20080066778
- Publication date Mar 20, 2008
- ASM JAPAN K.K.
- Kiyohiro Matsushita
- B08 - CLEANING
Information Patent Application
Method for forming insulation film
- Publication number 20060110931
- Publication date May 25, 2006
- ASM JAPAN K.K.
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System and method of CVD chamber cleaning
- Publication number 20050178333
- Publication date Aug 18, 2005
- ASM JAPAN K.K.
- Chou San Nelson Loke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming thin film
- Publication number 20050048797
- Publication date Mar 3, 2005
- ASM JAPAN K.K./
- Atsuki Fukazawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming a film on a semiconductor substrate
- Publication number 20040043626
- Publication date Mar 4, 2004
- Nelson Loke Chou San
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Kenichi KAGAMI

Person

Patents Grantslast 30 patents

Method of cleaning UV irradiation chamber

UV light irradiating apparatus with liquid filter

Method for forming insulation film

Method for managing UV irradiation for curing semiconductor substrate

Method of forming a thin film by plasma CVD of a silicon-containing...

Method of cleaning a CVD reaction chamber using an active oxygen sp...

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CURING MATERIA...

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR CURING MATERIA...

METHOD FOR MANAGING UV IRRADIATION FOR CURING SEMICONDUCTOR SUBSTRATE

UV LIGHT IRRADIATING APPARATUS WITH LIQUID FILTER

METHOD OF CLEANING UV IRRADIATION CHAMBER

Method for forming insulation film

System and method of CVD chamber cleaning

Method of forming thin film

Method of forming a film on a semiconductor substrate