Kenichi Kanai

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor detector and method of fabricating same
- Patent number 11,843,069
- Issue date Dec 12, 2023
- ASML Netherlands B.V.
- Gianpaolo Lorito
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor charged particle detector for microscopy
- Patent number 11,508,547
- Issue date Nov 22, 2022
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer grounding and biasing method, apparatus, and application
- Patent number 9,991,147
- Issue date Jun 5, 2018
- Hermes Microvision, Inc.
- Yi-Xiang Wang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Wafer grounding and biasing method, apparatus, and application
- Patent number 8,908,348
- Issue date Dec 9, 2014
- Hermes Microvision, Inc.
- Yi-Xiang Wang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Apparatus of plural charged particle beams with multi-axis magnetic...
- Patent number 8,445,862
- Issue date May 21, 2013
- Hermes-Microvision, Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged particle beams with multi-axis magnetic...
- Patent number 8,294,095
- Issue date Oct 23, 2012
- Hermes Microvision, Inc.
- Zhongwei Chen
- G01 - MEASURING TESTING
Information Patent Grant
Wafer grounding methodology
- Patent number 8,094,428
- Issue date Jan 10, 2012
- Hermes-Microvision, Inc.
- Yi Xiang Wang
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-axis magnetic lens
- Patent number 8,003,953
- Issue date Aug 23, 2011
- Hermes Microvision, Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for obtaining images by raster scanning charge...
- Patent number 7,982,186
- Issue date Jul 19, 2011
- Hermes Microvision, Inc.
- Kenichi Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrical defect detection using pre-charge and sense scanning wit...
- Patent number 7,560,939
- Issue date Jul 14, 2009
- KLA-Tencor Technologies Corporation
- Indranil De
- G01 - MEASURING TESTING
Information Patent Grant
Open-loop for waveform acquisition
- Patent number 6,853,941
- Issue date Feb 8, 2005
- NPTest, Inc.
- Hui Wang
- G01 - MEASURING TESTING
Information Patent Grant
Voltage contrast method and apparatus for semiconductor inspection...
- Patent number 6,566,897
- Issue date May 20, 2003
- Applied Materials, Inc.
- Chiwoei Wayne Lo
- G01 - MEASURING TESTING
Information Patent Grant
Voltage contrast method for semiconductor inspection using low volt...
- Patent number 6,344,750
- Issue date Feb 5, 2002
- Schlumberger Technologies, Inc.
- Chiwoei Wayne Lo
- G01 - MEASURING TESTING
Information Patent Grant
Predictive waveform acquisition
- Patent number 5,638,005
- Issue date Jun 10, 1997
- Schlumberger Technologies Inc.
- Suresh N. Rajan
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
- Publication number 20240234620
- Publication date Jul 11, 2024
- ASML NETHERLANDS B.V.
- Gianpaolo LORITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
- Publication number 20240136462
- Publication date Apr 25, 2024
- ASML NETHERLANDS B.V.
- Gianpaolo LORITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON OPTICAL COLUMN AND METHOD FOR DIRECTING A BEAM OF PRIMARY...
- Publication number 20240055219
- Publication date Feb 15, 2024
- ASML NETHERLANDS B.V.
- Mans Johan Bertil OSTERBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...
- Publication number 20230335374
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Benoit Herve GAURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20230123152
- Publication date Apr 20, 2023
- ASML NETHERLANDS B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME
- Publication number 20200212246
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Gianpaolo LORITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20190378682
- Publication date Dec 12, 2019
- ASML Netherlands B.V.
- Yongxin Wang
- G01 - MEASURING TESTING
Information Patent Application
WAFER GROUNDING AND BIASING METHOD, APPARATUS, AND APPLICATION
- Publication number 20150049411
- Publication date Feb 19, 2015
- HERMES MICROVISION INC.
- YI-XIANG WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC...
- Publication number 20120145917
- Publication date Jun 14, 2012
- Hermes Microvision, Inc.
- ZHONGWEI CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC...
- Publication number 20120145900
- Publication date Jun 14, 2012
- Hermes Microvision, Inc.
- ZHONGWEI CHEN
- G01 - MEASURING TESTING
Information Patent Application
MULTI-AXIS MAGNETIC LENS
- Publication number 20110139996
- Publication date Jun 16, 2011
- Hermes Microvision, Inc.
- ZHONGWEI CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER GROUNDING AND BIASING METHOD, APPARATUS, AND APPLICATION
- Publication number 20110051306
- Publication date Mar 3, 2011
- Hermes Microvision, Inc.
- YI-XIANG WANG
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR OBTAINING IMAGES BY RASTER SCANNING CHARGE...
- Publication number 20090244078
- Publication date Oct 1, 2009
- Kenichi Kanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Open-loop for waveform acquisition
- Publication number 20030016153
- Publication date Jan 23, 2003
- Hui Wang
- G01 - MEASURING TESTING
Information Patent Application
Voltage contrast method and apparatus for semiconductor inspection...
- Publication number 20020149381
- Publication date Oct 17, 2002
- Chiwoei Wayne Lo
- G01 - MEASURING TESTING

Kenichi Kanai

Person

Patents Grantslast 30 patents

Semiconductor detector and method of fabricating same

Semiconductor charged particle detector for microscopy

Wafer grounding and biasing method, apparatus, and application

Wafer grounding and biasing method, apparatus, and application

Apparatus of plural charged particle beams with multi-axis magnetic...

Apparatus of plural charged particle beams with multi-axis magnetic...

Wafer grounding methodology

Multi-axis magnetic lens

Method and apparatus for obtaining images by raster scanning charge...

Electrical defect detection using pre-charge and sense scanning wit...

Open-loop for waveform acquisition

Voltage contrast method and apparatus for semiconductor inspection...

Voltage contrast method for semiconductor inspection using low volt...

Predictive waveform acquisition

Patents Applicationslast 30 patents

SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME

SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME

ELECTRON OPTICAL COLUMN AND METHOD FOR DIRECTING A BEAM OF PRIMARY...

SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

SEMICONDUCTOR DETECTOR AND METHOD OF FABRICATING SAME

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

WAFER GROUNDING AND BIASING METHOD, APPARATUS, AND APPLICATION

APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC...

APPARATUS OF PLURAL CHARGED PARTICLE BEAMS WITH MULTI-AXIS MAGNETIC...

MULTI-AXIS MAGNETIC LENS

WAFER GROUNDING AND BIASING METHOD, APPARATUS, AND APPLICATION

METHOD AND APPARATUS FOR OBTAINING IMAGES BY RASTER SCANNING CHARGE...

Open-loop for waveform acquisition

Voltage contrast method and apparatus for semiconductor inspection...