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Kenichi Kanazawa
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Fukushima, JP
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last 30 patents
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Patent Grant
Water and method for storing silicon wafer
Patent number
8,303,722
Issue date
Nov 6, 2012
Shin-Etsu Handotai Co., Ltd.
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Water and method for storing silicon wafer
Publication number
20030139067
Publication date
Jul 24, 2003
Tatsuo Abe
H01 - BASIC ELECTRIC ELEMENTS