TREA

Kenichi Kato

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing system and edge ring replacement method
    • Patent number 11,901,163
    • Issue date Feb 13, 2024
    • Tokyo Electron Limited
    • Shin Matsuura
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Processing method
    • Patent number 10,665,431
    • Issue date May 26, 2020
    • Tokyo Electron Limited
    • Kazuyuki Tezuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents