Kenichi Koyanagi

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Methods to improve electrical performance of ZrO2 based high-K diel...
- Patent number 9,178,006
- Issue date Nov 3, 2015
- Intermolecular, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Leakage reduction in DRAM MIM capacitors
- Patent number 8,574,998
- Issue date Nov 5, 2013
- Intermolecular, Inc.
- Sandra Malhotra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High performance dielectric stack for DRAM capacitor
- Patent number 8,546,236
- Issue date Oct 1, 2013
- Intermolecular, Inc.
- Sandra G. Malhotra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High performance dielectric stack for DRAM capacitor
- Patent number 8,541,283
- Issue date Sep 24, 2013
- Intermolecular, Inc.
- Sandra G. Malhotra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High performance dielectric stack for DRAM capacitor
- Patent number 8,476,141
- Issue date Jul 2, 2013
- Intermolecular, Inc.
- Sandra Malhotra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High performance dielectric stack for DRAM capacitor
- Patent number 8,415,227
- Issue date Apr 9, 2013
- Intermolecular, Inc.
- Sandra Malhotra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for suppressing particle generation during semiconductor man...
- Patent number 8,277,891
- Issue date Oct 2, 2012
- Tokyo Electron Limited
- Yuichiro Morozumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 7,771,535
- Issue date Aug 10, 2010
- Elpida Memory, Inc.
- Kenichi Koyanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor storage device comprising a...
- Patent number 7,763,500
- Issue date Jul 27, 2010
- Elpida Memory, Inc.
- Takashi Arao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a metal oxide film
- Patent number 7,741,173
- Issue date Jun 22, 2010
- Elpida Memory, Inc.
- Kenichi Koyanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for manufacturing semiconductor device
- Patent number 7,576,016
- Issue date Aug 18, 2009
- Elpida Memory, Inc.
- Kenichi Koyanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
ALD process for capacitor dielectric
- Patent number 7,303,973
- Issue date Dec 4, 2007
- Elpida Memory, Inc.
- Kenichi Koyanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming a metal oxide film
- Patent number 7,256,144
- Issue date Aug 14, 2007
- Elpida Memory, Inc.
- Kenichi Koyanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Memory with memory cells that include a MIM type capacitor with a l...
- Patent number 7,224,016
- Issue date May 29, 2007
- Elpida Memory, Inc.
- Yoshitaka Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for semiconductor device manufacturing to include multistage...
- Patent number 6,939,760
- Issue date Sep 6, 2005
- Elpida Memory, Inc.
- Hirofumi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of appraising a dielectric film, method of calibrating tempe...
- Patent number 6,509,200
- Issue date Jan 21, 2003
- NEC Corporation
- Kenichi Koyanagi
- G01 - MEASURING TESTING
Information Patent Grant
High density plasma enhanced chemical vapor deposition method
- Patent number 6,346,302
- Issue date Feb 12, 2002
- NEC Corporation
- Koji Kishimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming trench isolation structure
- Patent number 6,191,002
- Issue date Feb 20, 2001
- NEC Corporation
- Kenichi Koyanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment of a tantalum oxide film
- Patent number 6,187,693
- Issue date Feb 13, 2001
- NEC Corporation
- Kenichi Koyanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing a multilevel interconnection structure
- Patent number 6,033,990
- Issue date Mar 7, 2000
- NEC Corporation
- Koji Kishimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and process for production thereof
- Patent number 6,005,291
- Issue date Dec 21, 1999
- NEC Corporation
- Kenichi Koyanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spin on glass material and method for forming a semiconductor devic...
- Patent number 5,891,234
- Issue date Apr 6, 1999
- NEC Corporation
- Kenichi Koyanagi
- C03 - GLASS MINERAL OR SLAG WOOL

Patents Applicationslast 30 patents

Information Patent Application
Methods to Improve Electrical Performance of ZrO2 Based High-K Diel...
- Publication number 20150228710
- Publication date Aug 13, 2015
- Elpida Memory, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20130285202
- Publication date Oct 31, 2013
- Elpida Memory, Inc.
- Kenichi KOYANAGI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH PERFORMANCE DIELECTRIC STACK FOR DRAM CAPACITOR
- Publication number 20130217202
- Publication date Aug 22, 2013
- Elpida Memory, Inc.
- Sandra G. Malhotra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LEAKAGE REDUCTION IN DRAM MIM CAPACITORS
- Publication number 20130143379
- Publication date Jun 6, 2013
- Elpida Memory, Inc.
- Sandra Malholtra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Performance Dielectric Stack for DRAM Capacitor
- Publication number 20130140619
- Publication date Jun 6, 2013
- Intermolecular, Inc.
- Sandra Malhotra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH PERFORMANCE DIELECTRIC STACK FOR DRAM CAPACITOR
- Publication number 20130143384
- Publication date Jun 6, 2013
- Elpida Memory, Inc.
- Sandra Malhotra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode Treatments for Enhanced DRAM Performance
- Publication number 20130071991
- Publication date Mar 21, 2013
- Elpida Memory, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrode Treatments for Enhanced DRAM Performance
- Publication number 20130069202
- Publication date Mar 21, 2013
- Elpida Memory, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH PERFORMANCE DIELECTRIC STACK FOR DRAM CAPACITOR
- Publication number 20130052792
- Publication date Feb 28, 2013
- Elpida Memory, Inc.
- Sandra Malhotra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE TREATMENTS FOR ENHANCED DRAM PERFORMANCE
- Publication number 20120235276
- Publication date Sep 20, 2012
- Intermolecular, Inc.
- Xiangxin Rui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20100203741
- Publication date Aug 12, 2010
- TOKYO ELECTRON LIMITED
- Yuichiro MOROZUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor manufacturing system
- Publication number 20080066677
- Publication date Mar 20, 2008
- Yuichiro Morozumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20080050884
- Publication date Feb 28, 2008
- ELPIDA MEMORY INC.
- Kenichi KOYANAGI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming a metal oxide film
- Publication number 20070205452
- Publication date Sep 6, 2007
- Kenichi Koyanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEMORY WITH MEMORY CELLS THAT INCLUDE A MIM TYPE CAPACITOR WITH A L...
- Publication number 20070148896
- Publication date Jun 28, 2007
- ELPIDA MEMORY, INC.
- Yoshitaka Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor manufacturing apparatus
- Publication number 20070051310
- Publication date Mar 8, 2007
- Elpida Memory, Inc.
- Kenichi Koyanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing semiconductor storage device
- Publication number 20070032034
- Publication date Feb 8, 2007
- ELPIDA MEMORY, INC.
- Takashi Arao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and fabrication method therefor
- Publication number 20040248362
- Publication date Dec 9, 2004
- ELPIDA MEMORY, INC.
- Yoshitaka Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for forming a metal oxide film
- Publication number 20040192036
- Publication date Sep 30, 2004
- Kenichi Koyanagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20040087178
- Publication date May 6, 2004
- ELPIDA MEMORY, INC.
- Kenichi Koyanagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20040004870
- Publication date Jan 8, 2004
- ELPIDA MEMORY, INC.
- Hirofumi Fujioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of appraising a dielectric film, method of calibrating tempe...
- Publication number 20020137239
- Publication date Sep 26, 2002
- NEC Corporation
- Kenichi Koyanagi
- G01 - MEASURING TESTING
Information Patent Application
HIGH DENSITY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION METHOD
- Publication number 20010048980
- Publication date Dec 6, 2001
- KOJI KISHIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Manufacturing method of semiconductor device having tantalum oxide...
- Publication number 20010016394
- Publication date Aug 23, 2001
- Kenichi Koyanagi
- H01 - BASIC ELECTRIC ELEMENTS

Kenichi Koyanagi

Person

Patents Grantslast 30 patents

Methods to improve electrical performance of ZrO2 based high-K diel...

Leakage reduction in DRAM MIM capacitors

High performance dielectric stack for DRAM capacitor

High performance dielectric stack for DRAM capacitor

High performance dielectric stack for DRAM capacitor

High performance dielectric stack for DRAM capacitor

Method for suppressing particle generation during semiconductor man...

Semiconductor manufacturing apparatus

Method for manufacturing semiconductor storage device comprising a...

Method for forming a metal oxide film

Process for manufacturing semiconductor device

ALD process for capacitor dielectric

Method for forming a metal oxide film

Memory with memory cells that include a MIM type capacitor with a l...

Method for semiconductor device manufacturing to include multistage...

Method of appraising a dielectric film, method of calibrating tempe...

High density plasma enhanced chemical vapor deposition method

Method of forming trench isolation structure

Heat treatment of a tantalum oxide film

Method for manufacturing a multilevel interconnection structure

Semiconductor device and process for production thereof

Spin on glass material and method for forming a semiconductor devic...

Patents Applicationslast 30 patents

Methods to Improve Electrical Performance of ZrO2 Based High-K Diel...

SEMICONDUCTOR DEVICE

HIGH PERFORMANCE DIELECTRIC STACK FOR DRAM CAPACITOR

LEAKAGE REDUCTION IN DRAM MIM CAPACITORS

High Performance Dielectric Stack for DRAM Capacitor

HIGH PERFORMANCE DIELECTRIC STACK FOR DRAM CAPACITOR

Electrode Treatments for Enhanced DRAM Performance

Electrode Treatments for Enhanced DRAM Performance

HIGH PERFORMANCE DIELECTRIC STACK FOR DRAM CAPACITOR

ELECTRODE TREATMENTS FOR ENHANCED DRAM PERFORMANCE

SEMICONDUCTOR MANUFACTURING SYSTEM

Semiconductor manufacturing system

PROCESS FOR MANUFACTURING SEMICONDUCTOR DEVICE

Method for forming a metal oxide film

MEMORY WITH MEMORY CELLS THAT INCLUDE A MIM TYPE CAPACITOR WITH A L...

Semiconductor manufacturing apparatus

Method for manufacturing semiconductor storage device

Semiconductor device and fabrication method therefor

Method for forming a metal oxide film

Method for manufacturing semiconductor device

Method for manufacturing semiconductor device

Method of appraising a dielectric film, method of calibrating tempe...

HIGH DENSITY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION METHOD

Manufacturing method of semiconductor device having tantalum oxide...