Kenichi Kubo

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Probe method, prober, and electrode reducing/plasma-etching process...
- Patent number 7,750,654
- Issue date Jul 6, 2010
- Octec Inc.
- Katsuya Okumura
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device
- Patent number 7,476,619
- Issue date Jan 13, 2009
- Tokyo Electron Limited
- Eiichi Kondoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system, evacuating system for processing system, low-pre...
- Patent number 6,966,936
- Issue date Nov 22, 2005
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for delivery of precursor vapor from low vapor...
- Patent number 6,548,112
- Issue date Apr 15, 2003
- Tokyo Electron Limited
- Joseph T. Hillman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron sputtering apparatus and sputtering gun for use in the same
- Patent number 5,334,302
- Issue date Aug 2, 1994
- Tokyo Electron Limited
- Kenichi Kubo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor device
- Publication number 20060154482
- Publication date Jul 13, 2006
- Eiichi Kondoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method, semiconductor device production method...
- Publication number 20050260846
- Publication date Nov 24, 2005
- Eiichi Kondoh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Deposition apparatus and a deposition method using medium in a supe...
- Publication number 20050158477
- Publication date Jul 21, 2005
- TOKYO ELECTRON LIMITED
- Vincent Vezin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Probe method, prober, and electrode reducing/plasma-etching process...
- Publication number 20050151549
- Publication date Jul 14, 2005
- Katsuya Okumura
- G01 - MEASURING TESTING
Information Patent Application
Processing system, evacuating system for processing system, low-pre...
- Publication number 20030037730
- Publication date Feb 27, 2003
- TOKYO ELECTRON LIMITED
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...