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Kenichi Makino
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Hiratsuka-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Position control system and velocity control system for stage drivi...
Patent number
6,668,202
Issue date
Dec 23, 2003
Sumitomo Heavy Industries, Ltd.
Kenichi Makino
G05 - CONTROLLING REGULATING
Information
Patent Grant
Stage position control method and stage position control apparatus...
Patent number
6,584,367
Issue date
Jun 24, 2003
Sumitomo Heavy Industries, Ltd.
Kenichi Makino
G05 - CONTROLLING REGULATING
Information
Patent Grant
Position controlling apparatus capable of reducing the effect of di...
Patent number
6,564,110
Issue date
May 13, 2003
Sumitomo Heavy Industries, Ltd.
Kenichi Makino
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
Information
Patent Application
Position control system and velocity control system for stage drivi...
Publication number
20030097193
Publication date
May 22, 2003
Sumitomo Heavy Industries, Ltd.
Kenichi Makino
G05 - CONTROLLING REGULATING