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Patents Grants
last 30 patents
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Patent Grant
Charged particle beam apparatus
Patent number
9,287,082
Issue date
Mar 15, 2016
Hitachi High-Technologies Corporation
Kenichi Morita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
CHARGED PARTICLE BEAM APPARATUS
Publication number
20150228443
Publication date
Aug 13, 2015
Hitachi High-Technologies Corporation
Kenichi MORITA
H01 - BASIC ELECTRIC ELEMENTS