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Kenichi Murakami
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Aizuwakamatsu, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Chemically amplified resist composition and method for forming patt...
Patent number
7,129,017
Issue date
Oct 31, 2006
Fujitsu Limited
Hajime Yamamoto
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Chemically amplified resist composition and method for forming patt...
Patent number
6,902,859
Issue date
Jun 7, 2005
Fujitsu Limited
Hajime Yamamoto
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
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Patent Application
Chemically amplified resist composition and method for forming patt...
Publication number
20050175936
Publication date
Aug 11, 2005
FUJITSU LIMITED
Hajime Yamamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Chemically amplified resist composition and method for forming patt...
Publication number
20020150834
Publication date
Oct 17, 2002
FUJITSU LIMITED
Hajime Yamamoto
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC