Kenichi Okubo

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Kumamoto-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,851,872
- Issue date Feb 8, 2005
- Tokyo Electron Limited
- Kenichi Okubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 6,507,770
- Issue date Jan 14, 2003
- Tokyo Electron Limited
- Masanori Tateyama
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing system and substrate processing method
- Publication number 20010051837
- Publication date Dec 13, 2001
- Masanori Tateyama
- G05 - CONTROLLING REGULATING