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Kenichi Orui
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Ausugi-shi, JP
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last 30 patents
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Patent Grant
Periodic acid compositions for polishing ruthenium/low K substrates
Patent number
7,968,465
Issue date
Jun 28, 2011
DuPont Air Products NanoMaterials LLC
Robert J. Small
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Patents Applications
last 30 patents
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Patent Application
Periodic Acid Compositions For Polishing Ruthenium/Low K Substrates
Publication number
20080038995
Publication date
Feb 14, 2008
Robert J. Small
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
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Patent Application
Slurry, chemical mechanical polishing method using the slurry, and...
Publication number
20060037942
Publication date
Feb 23, 2006
Seong-Kyu Yun
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...