Kenichi Oyama

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Shimogyo-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transport apparatus and heat treatment apparatus
- Patent number 8,383,990
- Issue date Feb 26, 2013
- Sokudo Co., Ltd.
- Akihiko Morita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND HEAT TREATMENT APPARATUS
- Publication number 20090060686
- Publication date Mar 5, 2009
- Sokudo Co., Ltd.
- Akihiko Morita
- H01 - BASIC ELECTRIC ELEMENTS